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Microscope

A microscope and lens barrel technology, applied in the field of microscopes, can solve the problems of slow detection efficiency and easy damage.

Pending Publication Date: 2021-12-07
FOCUS E BEAM TECH BEIJING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In the prior art, when the same sample requires a scanning electron microscope (SEM) and a nano-X-ray microscope (Nano-CT) for detection, it is necessary to place the sample in the scanning electron microscope for detection, and then place the sample in the nano-CT. Detection in a ray microscope, the detection efficiency of this process is slow, and the sample is installed on the corresponding sample stage many times, which is prone to the risk of damage

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Embodiment Construction

[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention , but not to limit the scope of the present invention.

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, ...

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Abstract

A microscope disclosed by the present invention comprises an electron optical lens barrel used for emitting a scanning electron beam; a sample table which is used for placing a sample; a target material which is movably arranged between the electron optical lens cone and the sample table; a driving mechanism which drives the target material to move between a first position and a second position, wherein the first position is the position where the electron beam acts on a sample, and the second position is the position where the electron beam acts on the target material to generate X-rays to irradiate the sample. According to the invention, through one-time installation of the sample, the dual-function detection of detection of the sample by a scanning electron microscope and detection of the sample by a nano X-ray microscope is completed.

Description

technical field [0001] The invention belongs to the technical field of electronic equipment, and in particular relates to a microscope. Background technique [0002] Scanning electron microscope (SEM), which uses a focused electron beam to scan the sample, stimulates various physical information through the interaction between the electron beam and the sample, collects, amplifies, and re-imaging the information to achieve the microscopic morphology of the material. The scanning electron microscope is widely used in the field of observing the surface morphology of materials. [0003] Nano-X-ray microscope (Nano-CT) uses X-ray beams to scan a layer of a certain thickness of the sample, and the detector receives the X-rays that pass through the layer, converts them into visible light, and converts them into electrical signals by photoelectric conversion. Three-dimensional CT images are formed after computer processing. CT images can reflect the geometric information and struc...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/28H01J37/26G21K7/00
CPCH01J37/28H01J37/261G21K7/00H01J37/20H01J37/285
Inventor 李帅何伟
Owner FOCUS E BEAM TECH BEIJING CO LTD