Ultra-precise efficient polishing device and method suitable for large-size KDP crystals

Abstract

The invention discloses an ultra-precise efficient polishing device and method suitable for large-size KDP crystals. The polishing device comprises a supporting unit, a precise horizontal movement sliding table, a workpiece polishing and clamping unit, a multi-point concentration continuous adjustable and controllable polishing solution supply unit, a base, a precise rotating table, a polishing pad finishing unit, an online measuring unit, a polishing residual liquid continuous suction and recovery unit and an equipment control system unit. The polishing method comprises three stages of rough polishing machining, fine polishing machining and ultra-precision polishing machining, different types of polishing solutions are adopted in each machining stage, full-caliber rough, fine and ultra-precision multi-process integrated polishing machining of the large-size KDP crystal can be achieved through a control system, and the polishing method has the remarkable advantages of being high in machining efficiency, high in machining precision and the like. According to the invention, the ultra-precision polishing processing of the large-size KDP crystal can be realized, the processing efficiency can be improved, and the high-efficiency, high-quality and near-zero-damage ultra-precision processing of the large-size KDP crystal can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision and ultra-precision polishing, and in particular relates to an ultra-precision and high-efficiency polishing device and method suitable for large-size KDP crystals. Background technique [0002] There is a class of deliquescent or water-soluble crystalline materials in nature, such as sodium chloride NaCl crystals, potassium dihydrogen phosphate KH 2 PO 4 Referred to as KDP crystal, etc. As a high-quality nonlinear optical material, KDP crystal can be used as frequency doubling conversion element and photoelectric switch, and has great engineering application value. KDP crystal materials used as optical components are usually required to be processed to ultra-precision precision. For example, the KDP crystal optical components used in inertial confinement nuclear fusion systems not only have a size of 400mm×400mm or more, but also require surface and subsurface layers to be nearly free of proc...

AI Technical Summary

Problems solved by technology

However, the overall processing efficiency is low, and the oily polishing fluid tends to remain on the crystal surface, making it difficult to clean, and no special equipment has been developed for processing

[0005] Chinese Patent CN101310922A discloses "Potassium Dihydrogen Phosphate Crystal Deliquescence Polishing Method", which uses a certain proportion of absolute ethanol and water to configure the polishing liquid, and after the diamond is fly-cut Due to the rapid volatilization and water absorption of anhydrous ethanol, it is easy to cause the concentration imbalance of the polishing solution and the rapid deliquescence of the surface after processing.

However, due to the single type of polishing fluid and the limitation of the micro-nano processing system, the size of KDP processed by this method is small, and there are crystal residues on the surface after processing, so it is difficult to achieve high-quality processing of large-sized KDP crystals

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