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Laser discharge cavity electrode loss compensable structure

A technology of electrode loss and compensation structure, applied in the field of lasers, can solve the problems of uneven material, large loss, unevenness, etc., and achieve the effects of quick replacement, low cost and simple method

Active Publication Date: 2021-12-10
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The shortcomings of the electrode lifting adjustment method are: due to uneven material, assembly position deviation, and incomplete electrical properties, the loss of the electrode surface is uneven everywhere, and the lifting adjustment method can only compensate on average. Loss, there will be unevenness in the local area, especially the loss of the edge part is greater than that of the middle position

Method used

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  • Laser discharge cavity electrode loss compensable structure
  • Laser discharge cavity electrode loss compensable structure
  • Laser discharge cavity electrode loss compensable structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] like Figure 1-7 Design, a laser discharge chamber electrode loss can compensate for a cavity 10, including a cavity 10 of a discharge chamber; a first electrode 20 and a second electrode 30; first electrode 20 and The polarity of the secondary electrode 30 is opposite; specifically, in the present embodiment, the second electrode 30 is a cathode, and the first electrode 20 is an anode. Wherein, the second electrode 30 is fixed to the side wall of the cavity 10 through the cathode base 31. A pre-ion zone structure 32 is provided near the second electrode 30. A refill sheet 11 is provided on both sides of the first electrode 20 and the second electrode 30.

[0056] like image 3 As shown, the first electrode 20 includes an annular baseband 21, and the annular baseband 21 is integrally a sleeve shape, and on a cross section perpendicular to the length of the first electrode 20, the annular baseband 21 is annular to facilitate rotatable settings.

[0057] A plurality of electrod...

Embodiment 2

[0082] The compensation structure of the laser discharge chamber electrode loss provided in this example is substantially the same as the first embodiment, and the difference is:

[0083] like Figure 8 As shown, the left ceramic flow sheet 61 and the right ceramic flow slicer 62 can be disposed on the bracket 40. The two flow slices can be displayed, and thereby, the strip slit width between the two can be adjusted, and the electrode strip 22 is supplied to the electrode strip 22 when the rotary ring base belt 21 is rotated, and the electrode strip 22 and the ready-to-enter work are avoided. The electrode strip 22 of the state is interfered with the left ceramic flow sheet 61 or the right ceramic flow sheet 62. When the electrode strip 22 is replaced in place, the movable ceramic flow sheet moves to the intermediate, reduces the width of the strip slot, and even holds the electrode strip 22 in the middle of the two.

[0084] As a result, the drive mechanism of the shaft 42 may als...

Embodiment 3

[0087] The compensation structure of the laser discharge chamber electrode loss provided in this example is basically the same as that of Example 1 or Example 2, and the difference is:

[0088] The second electrode 30 is the same as the first electrode 20. The second electrode 30 is configured with the first electrode 20, that is, the second electrode 30 is provided with the first electrode 20, and the electrode strip 21, the electrode strip 22, and the corresponding drive mechanism, such as the two electrodes can be realized. Self-compensation.

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Abstract

The invention provides a laser discharge cavity electrode loss compensable structure. The laser discharge cavity electrode loss compensable structure comprises a discharge cavity body; a first electrode and a second electrode are oppositely arranged in the cavity; the polarities of the first electrode and the second electrode are opposite; on the section perpendicular to the length direction of the first electrode, the first electrode comprises an annular base band, and a plurality of electrode strips are arranged on the annular base band in parallel at intervals; and the annular base band can carry the electrode strips to rotate, so that the second electrode can be selectively matched with one electrode strip to generate high-voltage discharge. The structure is simple, when the electrode strip used on the first electrode is lost, the height is reduced, and the distance between the second electrode and the electrode strip is increased, other new electrode strips can be opposite to the second electrode by rotating the annular base band, so that compensation and recovery of the distance between the first electrode and the second electrode are realized, the operation is simple and rapid, and normal use of the laser is not influenced.

Description

Technical field [0001] The present invention relates to the field of laser, and more particularly to a compensationable structure of an excimer laser discharge chamber electrode loss. Background technique [0002] At present, the electrodes in the excimer laser discharge chamber will continue to produce loss during discharge, in which the cathode loss is especially severe, resulting in gradually decline due to the height of the cathode discharge region, so that the distance between the cathode and the anode gradually increases. However, it affects discharge performance. When the cathode anode spacing increases to a certain extent, the electrode must be replaced, wherein the operation is complex, the efficiency is low, which affects the continuous use of the excimer laser. [0003] In order to keep the distance between the cathode and the anode constant, the electrode is used to reduce the electrodes in the electrode height direction to reduce the pitch of the yin and yang two ele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/105
CPCH01S3/105
Inventor 吴劲松刘斌陈文斌马放江锐
Owner RAINBOW SOURCE LASER RSLASER
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