One-translation two-rotation large-stroke coupling-free large hollow parallel piezoelectric micro-motion platform

Abstract

The invention discloses a one-translation two-rotation large-stroke coupling-free large hollow parallel piezoelectric micro-motion platform, which comprises a fixed platform; a movable platform is arranged above the fixed platform in a clearance mode, light holes are formed in the center of the fixed platform and the center of the movable platform; the fixed platform is provided with a first driving unit, a second driving unit, a third driving unit and a fourth driving unit, wherein the four driving units are respectively and sequentially propped against four orthogonal directions below the movable platform; the first driving unit, the second driving unit, the third driving unit and the fourth driving unit are the same in structure and comprise bases fixed to the fixed platform, lever assemblies connected to the bottom of the movable platform and the bases respectively and power devices applied to the lever assemblies; the four driving units are the same in structure, and each driving unit comprises a base, a first flexible part, a lever, a second flexible part and a power device. In the vertical thickness direction, the structural layout is compact, the displacement stroke of the platform is large, and meanwhile, the displacement transmitted by the first flexible piece type lever cannot generate coupling displacement.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and in particular relates to a large hollow parallel piezoelectric micro-motion platform with one translation and two rotations with large stroke and no coupling. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision processing and testing, optical fiber docking, optical adjustment, mic...

AI Technical Summary

Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long lever, the moving platform is far away from the fixed platform, and on the one hand, the platform structure is huge and not compact; Applied to occasions where the platform is required to have a low thickness; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small; when rotating around one axis, a coupling angle around the other axis will be generated at the same time

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