One-translation two-rotation large-stroke coupling-free large hollow parallel piezoelectric micro-motion platform
A technology of micro-movement platform and large stroke, applied in micro-structure technology, micro-structure device and other directions, can solve the problems of large platform height, uncompactness, small platform displacement stroke, etc., and achieve the expansion of displacement stroke, easy integration and overall compactness Effect
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[0040] Embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0041] Figure 1 to Figure 8It is a structural schematic diagram of the present invention. The reference signs therein are: fixed platform 1, receiving groove 11, first inner wall 111, first fixing screw 112, moving platform 2, light-transmitting hole 3, first driving unit 4, second driving unit 5, third driving unit Unit 6, fourth driving unit 7, auxiliary seat 81, fourth flexible member 811, base 82, second flexible member 83, lever 84, first segment body 841, second segment body 842, third segment body 843, Fourth segment body 844, third flexible member 85, first side 861, second side 862, third side 863, fourth side 864, first flexible member 88, first through hole 881, first vertical through groove 882 , the first inclined slot 883, the second through hole 884, the second vertical slot 885, the second inclined slot 886, the bridge amplif...
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