Two-translation one-rotation large-stroke coupling-free large hollow parallel piezoelectric micro-motion platform

Abstract

The invention discloses a two-translation one-rotation large-stroke coupling-free large hollow parallel piezoelectric micro-motion platform which comprises a movable table board, a fixed table body isarranged below the movable table board in a gap mode, a movable table body is arranged in the fixed table body in a gap mode, and a first screw is fixed between the movable table body and the movabletable board in a screwed mode. The movable table body comprises a first edge, a second edge, a third edge and a fourth edge which are sequentially and vertically arranged in the anti-clockwise direction of the movable table body. The fixed table body is provided with a first driving unit acting on the first edge in a telescopic mode, a second driving unit acting on the second edge in a telescopicmode, a third driving unit acting on the second edge in a telescopic mode, a first sensor assembly facing the third edge, a second sensor assembly facing the fourth edge and a third sensor assembly.And two translational motions and one rotation of the movable table board can be realized through the coordinated control of the voltage control of the first driving unit, the second driving unit andthe third driving unit. The integrated capacitive displacement sensor has the advantages of simple and compact structure, large working table surface, large stroke, no parasitic displacement, high inherent frequency and convenience in integration of the capacitive displacement sensor.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a large hollow parallel piezoelectric micro-motion platform with two translations and one rotation with large stroke and no coupling. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision proces...

AI Technical Summary

Problems solved by technology

The superposition type is to firstly manufacture a single-degree-of-freedom piezoelectric micro-motion platform that can output micro-displacement along the x, y, and z directions, and then stack the three platforms in layers in the height direction. This kind of platform design is easy. There is no coupling in motion (that is, when the platform moves in a certain direction, there will be no parasitic displacement in the other direction), and the installation and pre-tightening of the piezoelectric actuator are convenient, but the volume is large, the structure is not compact, the natural frequency is low, and each direction of motion The performance parameters need to be designed separately

The serial type is to first make a moving platform (intermediate moving platform) that can produce movement in another direction on the moving platform (outer moving platform) that produces movement in one direction, and then make a moving platform that can produce movement in the last direction in the middle moving platform. The moving platform (inner moving platform) has a compact structure, and each moving platform has no coupling in motion, but the effective table is small, and the piezoelectric actuators used to drive the intermediate moving platform and the inner moving platform are installed and preloaded Difficult, the performance parameters of each direction of motion also need to be designed separately

The parallel type uses the same moving platform to realize the movement in all directions. It is convenient to install and pre-tighten the piezoelectric actuator. The performance parameters of each movement direction can be designed at the same time. The structure is complex and not compact, the worktable is small, the displacement stroke is small, there is displacement coupling, the natural frequency is low, and it is not easy to integrate displacement sensors

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