Six-degree-of-freedom large-stroke uncoupled large hollow series-parallel piezoelectric micro-motion platform

Abstract

The invention discloses a six-degree-of-freedom large-stroke non-coupling large hollow series-parallel piezoelectric micro-movement platform, including a base, a moving table, a second platform and a first platform; a first guiding unit, a second guiding unit, a third guiding unit, The fourth guide unit, the fifth guide unit and the sixth guide unit are respectively connected to the second platform and the first platform in sequence; the first guide unit is provided with a first drive unit, and the second guide unit is provided with a second drive unit, The third guide unit is provided with a third drive unit; the base is provided with a fourth drive unit, a fifth drive unit, a sixth drive unit and a seventh drive unit arranged in sequence in a rectangular shape and vertically telescopically acting on the second platform, The fifth driving unit is arranged under the second driving unit, and the sixth driving unit is arranged under the third driving unit. The invention has the advantages of simple and compact structure, large working table, large displacement stroke, no displacement coupling, high natural frequency and easy integration of displacement sensors.

Description

technical field [0001] The invention belongs to the technical field of nano-positioning, relates to a micro-displacement mechanism in a nano-positioning system, and particularly relates to a six-degree-of-freedom large-stroke non-coupling large hollow series-parallel piezoelectric micro-motion platform. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision processing and tes...

AI Technical Summary

Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long connecting rod, the moving platform is far away from the fixed platform, which makes the platform structure large and not compact; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small ;When moving in one direction, it will produce coupled movement along the other two directions, and when rotating around one axis, it will produce coupled rotation angles around the other two axes, which makes the kinematics solution and motion control of the moving platform extremely complicated

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