Piezoelectric actuator trajectory tracking control method based on integral type high-order sliding mode control

Abstract

The invention belongs to the technical field of piezoelectric actuator control, and particularly discloses a piezoelectric actuator trajectory tracking control method based on integral type high-order sliding mode control. The method comprises the following steps: 1, acquiring signals of a piezoelectric actuator, and identifying a mathematical model of the piezoelectric actuator by adopting a second-order linearization mathematical model; 2, estimating the total disturbance of the system by adopting an extended state observer; and step 3, according to the identified mathematical model and the total disturbance estimated by the extended state observer, adopting an integral type high-order sliding mode controller to realize high-precision trajectory tracking control of the piezoelectric actuator. The method has the beneficial effects that the problem that the disturbance upper bound cannot be accurately obtained is solved, the convergence speed is high, the singular problem is avoided, the continuity of the control quantity is ensured, the chattering phenomenon is effectively improved, and the control precision is improved.

Description

technical field [0001] The invention relates to the technical field of piezoelectric driver control, in particular to a piezoelectric driver trajectory tracking control method based on integral high-order sliding mode control. Background technique [0002] With the continuous development and progress of micro-nano technology, the application requirements of high-precision systems are also increasing, and at the same time, higher requirements are put forward for motion accuracy and resolution. Compared with traditional rigid mechanisms, flexible mechanisms have been widely used in high-precision motion systems such as micro-nano technology due to their advantages such as low cost, small size, no friction, no gap, high resolution, and easy production. . Because traditional AC / DC motors are difficult to meet the requirements of high-precision driving force, piezoelectric actuators have the advantages of small size, high precision, large driving force, fast response speed, and ...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the above technical problems, the object of the present invention is to provide a piezoelectric actuator trajectory tracking control method based on integral high-order sliding mode control, which includes step 1: collecting the signal of the piezoelectric actuator, and using the second-order linearization mathematical model identification Get the mathematical model of the piezoelectric actuator; Step 2: Use the extended state observer to estimate the total disturbance of the system; Step 3: According to the identified mathematical model and the total disturbance estimated by the extended state observer, use the integral high-order sliding mode control The device realizes the high-precision trajectory tracking control of the piezoelectric actuator. The piezoelectric actuator trajectory tracking control method based on the integral high-order sliding mode control has the advantages of solving the problem that the upper bound of the disturbance cannot be obtained accurately, fast convergence speed, and avoiding singular problems. The advantages of ensuring the continuity of the control amount, effectively improving the chattering phenomenon, and improving the control accuracy

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