Workpiece table moving device

Abstract

The invention relates to the technical field of photoetching machines, and discloses a workpiece table moving device, which comprises a supporting frame, a fixed platform, a first fixing mechanism, a moving platform, a second fixing mechanism and an air floating mechanism, and a workbench moves relative to the fixed platform or the moving platform through the air floating mechanism and does not have contact friction with a supporting surface; compared with a roller plate spring mechanism, the influence of friction loss on the flatness of a supporting surface is eliminated, the positioning precision of the workpiece table is ensured, and the control difficulty in the moving-in and moving-out process of the workpiece table is reduced; secondly, the workpiece table moving device adopts a workpiece table transfer mode that the moving platform is connected with the fixed platform, so that the suspension motion stroke of the workpiece table is greatly shortened to the distance from the supporting surface of the fixed platform to the supporting surface of the moving platform, the moving-in and moving-out efficiency of the workpiece table is further improved, the operation is relatively convenient, long-distance movement of the large-mass and large-size workpiece table is achieved, and the possibility that the workpiece table falls off and is damaged is reduced.

Description

technical field [0001] The invention relates to the technical field of photolithography machines, in particular to a workpiece table moving device. Background technique [0002] The lithography machine is the core equipment of the integrated circuit manufacturing industry, and the workpiece table is one of the core components of the lithography machine. As lithography machines become more refined and their structures more complex, the size and weight of the workpiece table are also increasing, and the mass of the workpiece table currently weighs several tons. When it is necessary to move the workpiece table out of the lithography machine frame and perform maintenance or replace parts, how to quickly, safely and reliably move the workpiece table in and out of the lithography machine frame has become a problem that has to be faced. [0003] Most of the existing workpiece table moving devices usually use a roller leaf spring mechanism, which drives the rollers to contact the g...

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Problems solved by technology

[0003] Most of the existing workpiece table moving devices usually use a roller leaf spring mechanism, which drives the rollers to contact the ground through the deformation of the leaf spring, thereby driving the workpiece table to move. However, due to the rolling friction of this device, as the mass of the workpiece table increases, Large, the friction also increases sharply, resulting in inevitable wear, and at the same time increases the difficulty of controlling the movement of the workpiece table; a small part of the workpiece table moving device adopts the air flotation mechanism, but there is still a long moving distance, resulting in the workpiece table The problem of inconvenient manipulation and easy fall and damage

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