Method and system for magnetizing elements of magnetic field sensor arrangement
A technology of magnetic field sensor and magnetized magnetic field, which is applied in the direction of magnetization intensity measurement, instruments, measuring devices, etc., and can solve problems such as wrong orientation
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[0023] figure 1 The magnetic field sensor 1 is shown schematically in a perspective view. The magnetic field sensor 1 is based, for example, on the principle of magnetic tunnel resistance (English: tunnel magnetoresistance, tunnel magnetoresistance, TMR). Therefore, the magnetic field sensor 1 can also be referred to as a TMR sensor 1 .
[0024] The magnetic field sensor 1 has a substrate 2 . For example, substrate 2 can comprise silicon. However, substrate 2 can also comprise other materials, for example other semiconductors and / or semiconductor oxides. The magnetic field sensor 1 also has an integrated circuit 3 (English: integrated circuit, IC) arranged on a substrate 2 . For example, integrated circuit 3 can be provided for operating magnetic field sensor 1 .
[0025]An electrically conductively embodied lower contact element 4 is arranged above the substrate 2 . A lower ferromagnetic layer 5 is arranged on the lower electrical contact element 4 . The lower ferromag...
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