Transmission-type optical switch, array transmission-type optical switch and electronic equipment
An optical switch and transmissive technology, which is applied in optics, optical components, instruments, etc., can solve the problems of high driving voltage and power consumption, difficulty in accurately controlling light-shielding elements, and failure of pixel suction, so as to reduce driving voltage and power consumption , Reduce energy consumption, high light rate effect
Active Publication Date: 2022-02-08
BEIJING INSTITUTE OF TECHNOLOGYGY +1
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Problems solved by technology
When electrostatic driving is used, the current required driving voltage is relatively high, generally as high as 50V ~ 100V, and the electrostatic driving method has a typical feature of "sticking phenomenon", which can easily lead to pixel pull-in failure; at the same time, this is a A binary driving method, that is, either on or off, and cannot continuously control light
When electrothermal drive is used, larger shading elements can be set to form a larger shading area; however, the electrothermal drive itself occupies a large volume, which is not conducive to the miniaturization of MEMS transmissive optical switches, and the driving voltage and power consumption are relatively high. high
In addition, it is difficult to accurately control the position of the shading element, and the light transmittance of the MEMS transmissive optical switch is low
Method used
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Embodiment 3
[0183] see Figure 5 shown, Figure 5 A third transmissive optical switch is provided as a schematic structural diagram of a transmissive optical switch in an embodiment of the present disclosure.
[0184] The transmissive optical switch includes a substrate 1 , a driving device 2 and an electrostatic attraction device.
[0185] The substrate 1 is a light-transmitting material, and a light-transmitting area is formed on the substrate 1 .
[0186] One end of the driving device 2 is connected to the substrate 1, the driving device 2 is suspended on the substrate 1, and the driving device 2 can be bent, deformed and flattened;
[0187] Wherein, the drive device 2 is a piezoelectric drive, the first material layer is a silicon dioxide material, and the second material layer is a piezoelectric ceramic;
[0188] In addition, a plurality of convex points (ie, convex structures 8 ) with a triangular cross-section are also designed on the lower surface of the driving device 2 .
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The invention provides a transmission-type optical switch, an array transmission-type optical switch and electronic equipment. The transmission-type optical switch comprises a substrate, a driving device and an electrostatic suction device, a light-transmitting area is formed on the substrate; one end of the driving device is connected with the substrate, the driving device is suspended on the substrate, and the driving device is constructed to be capable of bending deformation and flattening; the electrostatic attraction device comprises a first electrostatic electrode and a second electrostatic electrode, the first electrostatic electrode is located on the substrate and made of a light-transmitting material, and the second electrostatic electrode is located on the driving device; when the driving device is in a flattened state, the driving device can be attracted to the first electrostatic electrode through static electricity of the second electrostatic electrode so as to close the light-transmitting area. According to the scheme, a new driving mode is provided for the optical switch, the driving voltage and the power consumption can be obviously reduced, and meanwhile the energy consumption for maintaining the closing of the optical switch is reduced.
Description
technical field [0001] Embodiments of the present disclosure relate to the technical field of transmissive optical switches, and more specifically, the present disclosure relates to a transmissive optical switch, an array transmissive optical switch, and electronic equipment. Background technique [0002] MEMS transmissive optical switches are used to control the passing rate of light. Therefore, it can be applied in many optical scenes. In recent years, with the application of MEMS transmissive optical switches, MEMS transmissive optical switches with greatly reduced volume have been widely used in fields such as smart windows, smart lighting, smart display, and optical detection. [0003] As far as the prior art is concerned, common methods of driving MEMS transmissive optical switches include electrostatic driving and electrothermal driving. When electrostatic driving is used, the current required driving voltage is relatively high, generally as high as 50V to 100V, and...
Claims
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Login to View More IPC IPC(8): G02B26/02
CPCG02B26/02
Inventor 谢会开肖磊王鹏丁英涛
Owner BEIJING INSTITUTE OF TECHNOLOGYGY