Automatic gas distribution device for mixed gas and method thereof
A mixed gas, automatic technology, applied in chemical instruments and methods, mixers, gas and gas/vapor mixing, etc., can solve the problem of uncontrollable gas flow rate at the end of gas filling, manual control operation errors, low mixed gas preparation accuracy, etc. problems, to avoid mistakes, improve accuracy, and improve control accuracy.
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[0039] The invention will be described in connection with the accompanying drawings and specific embodiments, but is not limited as the patent of the invention.
[0040] Such as figure 1 As shown, a mixed gas automatic gas supply device includes a charge line 1, a second gas delivery line 2, a first gas delivery line 3, a second gas control valve 4, a first gas. Control valve 5, adjust valve front pressure sensor 6, regulating valve 7, flow meter 8, regulating valve rear pressure sensor 9, filling control valve 10, mixed air container 11, electronic balance 12, vacuum pump line, vacuum pump 13, vacuum control Valve 14 and temperature sensors.
[0041] Electronic balance 12 uses ultra-high precision electronic scales at the comparator level, which typically parameter is 150kg ± 0.05g.
[0042] Vacuum pump 13 with a vacuum reaches 1 × 10 -5 High vacuum double vacuum pump of PA.
[0043] The regulating valve front pressure sensor 6 and the regulating valve rear pressure sensor 9 are ...
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