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Automatic gas distribution device for mixed gas and method thereof

A mixed gas, automatic technology, applied in chemical instruments and methods, mixers, gas and gas/vapor mixing, etc., can solve the problem of uncontrollable gas flow rate at the end of gas filling, manual control operation errors, low mixed gas preparation accuracy, etc. problems, to avoid mistakes, improve accuracy, and improve control accuracy.

Pending Publication Date: 2022-02-25
PERIC SPECIAL GASES CO LTD
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  • Claims
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Problems solved by technology

[0004] In order to overcome the defects in the prior art, the purpose of the present invention is to provide an automatic gas distribution device and method for mixed gas; to solve the problem of uncontrollable gas flow rate at the end of gas filling in the current mixed gas preparation process, low precision of mixed gas preparation and Problems with manual control errors

Method used

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  • Automatic gas distribution device for mixed gas and method thereof
  • Automatic gas distribution device for mixed gas and method thereof

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Embodiment Construction

[0039] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation to the patent of the present invention.

[0040] Such as figure 1 As shown, an automatic gas distribution device for mixed gas, the gas distribution device includes a filling pipeline 1, a second gas delivery pipeline 2, a first gas delivery pipeline 3, a second gas control valve 4, a first gas Control valve 5, pressure sensor before regulating valve 6, regulating valve 7, flow meter 8, pressure sensor after regulating valve 9, filling control valve 10, mixed gas container 11, electronic balance 12, vacuum pump pipeline, vacuum pump 13, vacuum control Valve 14 and temperature sensor.

[0041] The electronic balance 12 adopts a comparator-level ultra-high-precision electronic scale, and its typical parameter is 150kg ± 0.05g.

[0042] Vacuum pump 13 adopts vacuum degree to reach 1×10 -5 Two-stage vacuum pump for high v...

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Abstract

The invention relates to an automatic gas distribution device for mixed gas and a method thereof, and belongs to the technical field of electronic mixed gas. The gas distribution device comprises a filling pipeline, a second gas conveying pipeline, a first gas conveying pipeline, a second gas control valve, a first gas control valve, a pressure sensor in front of a regulating valve, the regulating valve, a flow meter, a pressure sensor behind the regulating valve, a filling control valve, a mixed gas container, an electronic balance, a vacuum pump pipeline, a vacuum pump, a vacuum control valve and a temperature sensor; the gas distribution method is completed by adopting the gas distribution device. Flow control is carried out on gas introduced into a filling pipeline, and the gas flow is adjusted to the set flow according to specific requirements through a DCS according to the front pressure and the rear pressure of the regulating valve, so that the accuracy of the content of each gas in the configured mixed gas can be improved; according to the gas distribution device and method, the mixed gas can be completely and automatically prepared, and the content of each gas component in the mixed gas is accurately controlled.

Description

technical field [0001] The invention relates to an automatic gas distribution device and method for mixed gas, belonging to the technical field of electronic mixed gas. Background technique [0002] The production of modern semiconductors, light-emitting diodes (LEDs), and photovoltaics requires a large amount of electronic mixed gas, and the requirements for the purity of the electronic mixed gas and the accuracy of gas distribution are very high. Filling technology puts forward higher requirements. [0003] In the semiconductor manufacturing process, in order to ensure the stability and repeatability of the process, the accuracy of the concentration of the electron mixture gas is required to be high. The weighing method preparation of the mixed gas does not need to consider the compression coefficient and temperature, and the accuracy is high, so it is more common in the electronic mixed gas preparation; but the configuration method is complicated to operate and requires ...

Claims

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Application Information

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IPC IPC(8): B01F35/71B01F35/22B01F35/21B01F35/80B01F35/221B01F33/70B01F23/10
Inventor 闫云张净普路光辉李旭罗文键张帅张雷李丹丹
Owner PERIC SPECIAL GASES CO LTD
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