Double-microscope measuring equipment and method
A technology for measuring equipment and microscopes, applied in measuring devices, material analysis through optical means, instruments, etc., can solve the problems of low measurement efficiency, high center of gravity, long stability time, etc., and achieve the effect of improving measurement efficiency
Pending Publication Date: 2022-02-25
ZHAOQING ZHONGDAO OPTOELECTRONICS EQUIP CORP
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Problems solved by technology
The disadvantage of the existing technology is that the mass of the gantry is relatively large, the center of gravity is relatively high, the machine needs a long time to stabilize after moving, and the measurement efficiency is relatively low
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[0028] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0029] attached figure 1 A schematic structural diagram of a dual microscope measuring device according to an embodiment of the present invention is shown, as figure 1 As shown, it includes: two microscopes, a gantry, and a fixture; wherein, the two microscopes are installed on the axis of the gantry and can move back and forth on the gantry; the microscope has an electric fine-tuning device installed at the connection between the ...
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The invention discloses double-microscope measuring equipment and method. The double-microscope measuring equipment comprises two microscopes, a gantry and a clamp; wherein the two microscopes are mounted on the shaft of the gantry and can move back and forth on the gantry; the microscope is provided with an electric fine adjustment device which is arranged at the joint of the microscope and the gantry so as to perform fine adjustment on the position of the microscope; and / or the clamp is provided with a rotary electric fine adjustment device which is arranged at the bottom of the clamp so as to finely adjust the position of the clamp. During measurement, measurement points in the same row are equally divided left and right, if the number of the points is an odd number, a virtual point is added, the left microscope is responsible for the left point, the right microscope is responsible for the right point, and movement and measurement are sequentially and simultaneously carried out on the points one by one in the same direction from left to right or from right to left. The equipment has the advantages that the substrate and the clamp thereof are small in mass and low in gravity center, the machine table can be stable within a short time after being moved, measurement can be carried out quickly, and the measurement efficiency is improved.
Description
technical field [0001] The invention relates to the technical field of screen detection, in particular to a dual microscope measuring device and method. Background technique [0002] With the increase in the size of the LCD screen and OLED screen substrate, the required measurement points increase accordingly, and the measurement cycle time increases accordingly. In order to shorten the cycle time, the equipment uses dual microscopes for measurement. Because the measurement magnification is relatively high and the depth of field of the lens is relatively small, the requirements for vibration will be relatively high. The general dual microscope measurement equipment needs a long stabilization time to measure, and the measurement efficiency is relatively low. [0003] In the existing dual-microscope measuring equipment, two microscopes are respectively installed on different moving gantry for measurement. The disadvantage of the prior art is that the mass of the gantry is rel...
Claims
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IPC IPC(8): G01N21/01G01N21/84
CPCG01N21/01
Inventor 张梁陈焜李波
Owner ZHAOQING ZHONGDAO OPTOELECTRONICS EQUIP CORP