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Micro-lens array ultra-precision machining error evaluation method and system

A micro-lens array, ultra-precision machining technology, applied in the directions of geometric characteristics/aberration measurement, optics, measuring devices, etc., can solve the limitations of micro-lens array quality assessment. The surface roughness, position error and shape error of a single lens lack effective evaluation. methods and other issues to achieve the effect of reducing uncertainty

Pending Publication Date: 2022-03-04
GUANGDONG UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to provide a microlens array ultra-precision machining accuracy evaluation method and system, which can effectively evaluate the shape error and position error of different types of microlens arrays, so as to solve the problem that the quality evaluation of microlens arrays is limited to a single lens Surface roughness, lack of effective evaluation methods for position error and shape error

Method used

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  • Micro-lens array ultra-precision machining error evaluation method and system
  • Micro-lens array ultra-precision machining error evaluation method and system
  • Micro-lens array ultra-precision machining error evaluation method and system

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Embodiment 1

[0085] like image 3 As shown, a microlens array ultra-precision machining accuracy evaluation method, the method is suitable for microlens arrays with circular openings, the method specifically includes the following steps:

[0086] Step S1, the white light interferometer obtains the microlens array diagram of the microlens array with a circular opening, the microlens array diagram is as follows Figure 4 shown.

[0087] Step S2, using library functions in the OpenCV library to preprocess the microlens array image to obtain a preprocessed microlens array image. Specifically include:

[0088] Step S2.1, call the OpenCV library in Python, utilize the library function in the OpenCV library to read the microlens array diagram, and carry out the following preprocessing to the microlens array diagram:

[0089] Step S2.2, using a median filter method to denoise the microlens array image to obtain a denoised microlens array image. Since the noise in the microlens array image will...

Embodiment 2

[0113] like Figure 8 As shown, this embodiment proposes a method for evaluating the ultra-precision machining accuracy of microlens arrays. This method is applicable to microlens arrays with hexagonal openings, and microlens arrays with rectangular, square and other quadrilateral openings. (principle and steps are basically the same as the hexagonal microlens array, except that the quadrilateral already has a rectangular outline, and there is no need to determine the rectangular outline like a hexagon), the method specifically includes the following steps:

[0114] Step T1, the white light interferometer acquires a microlens array image of a hexagonal microlens array.

[0115] Step T2, using library functions in the OpenCV library to preprocess the microlens array image to obtain a preprocessed microlens array image. Specifically include:

[0116] Step T2.1, call the OpenCV library in Python, and utilize the library function in the OpenCV library to carry out the following ...

Embodiment 3

[0144] In this embodiment, aiming at the evaluation method of microlens array ultra-precision machining error, a method for evaluating the spherical radius error of microlens array is proposed, which specifically includes the following steps:

[0145] (1) The white light interferometer acquires the three-dimensional data of a single lens unit.

[0146] (2) Transform the sphere equation into a linear equation in matrix product format, use the three-dimensional data to fit the converted linear equation to obtain a linear equation with a high degree of fitting, and calculate the actual radius of the fitted sphere value.

[0147] Wherein, the described sphere equation is converted into a linear equation in matrix product format, specifically including:

[0148] The spatial spherical equation (x-a) 2 +(y-b) 2 +(z-c) 2 =R 2 into the following form:

[0149] -2xa-2yb-2zc+1*(a 2 +b 2 +c 2 -R 2 )=-x 2 -y 2 -z 2

[0150] setting A 1 =-2x,A 2 =-2y,A 3 =-2z,A 4 =a 2 +b ...

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Abstract

The invention relates to a micro-lens array ultra-precision machining precision evaluation method and system, and belongs to the field of micro-lens array quality evaluation.The method comprises the steps that firstly, a white light interferometer obtains a micro-lens array diagram; calling a library function for preprocessing; performing Hough circle transformation on the preprocessed micro-lens array diagram by using a Hough circle transformation function to obtain a center coordinate and a radius value of each lens unit; calculating an actual center coordinate and an actual radius value of each lens unit by combining the actual size and the pixel size of the micro-lens array diagram; calculating an actual linear distance value between the actual center coordinate and the absolute coordinate point of the center lens unit, and taking a difference value between the actual linear distance value and a linear distance design value as a position error; taking the difference value between the actual radius value of each lens unit and the design value of the opening radius of the lens unit as a shape error; and finally, drawing a position error distribution diagram and a shape error distribution diagram, and effectively and accurately evaluating the shape error and the position error of the micro-lens array.

Description

technical field [0001] The invention relates to the field of microlens array processing quality evaluation, in particular to a microlens array ultra-precision processing error evaluation method and system. Background technique [0002] Optical microlens arrays not only require all lens units to have nanometer-level surface roughness and submicron-level shape accuracy, but also require the processing of the entire array to meet sub-micron-level positional accuracy. Ultra-precision processing technology can obtain optical microlens arrays that meet the precision requirements, but the microlens arrays obtained by processing generally have the problem of inconsistent processing accuracy, mainly in the surface roughness, shape accuracy and position of each lens unit. Inconsistency of errors. [0003] At present, the evaluation of the processing quality of the microlens array is limited to the surface roughness of a single lens unit. When evaluating the surface roughness, a non-c...

Claims

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Application Information

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IPC IPC(8): G01M11/02G01B11/30G02B27/00
CPCG01M11/025G01B11/303G02B27/0012Y02P90/30
Inventor 王素娟缪国群卫劲锋
Owner GUANGDONG UNIV OF TECH
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