Electrostatic force applying method and system considering deformation of electrode surface and thin film reflecting surface
A technology of reflecting surface and electrode surface, applied in the field of electrostatic force application method and system
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0068] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0069] Aiming at the problems existing in the prior art, the present invention provides an electrostatic force application method considering the deformation of the electrode surface and the film reflective surface. The present invention will be described in detail below with reference to the accompanying drawings.
[0070] Such as figure 1 As shown, the electrostatic force application method provided by the embodiment of the present invention considering the deformation of the electrode surface and the film reflective surface includes the following steps:
[0071] S101, establishing a finite element model of an electrosta...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


