MEMS silicon-based pore cavity atomizing core and manufacturing method thereof

Abstract

The invention discloses an MEMS silicon-based pore cavity atomization core which comprises a silicon substrate, a filling layer and a heating wire, a plurality of micropores are formed in the surface of one side of the silicon substrate, at least one liquid inlet hole is formed in the surface of the opposite side of the silicon substrate, the micropores comprise atomization holes and release holes, a liquid storage cavity is formed in the silicon substrate, the release holes are communicated with the liquid storage cavity, and the liquid storage cavity is communicated with the filling layer. The atomization hole is communicated to the liquid storage cavity, the liquid inlet hole is communicated to the liquid storage cavity, the filling layer is manufactured on the surface of one side of the micropore in the silicon substrate and seals the top of the release hole, the heating wire is manufactured on the surface of the filling layer, and a contact electrode is arranged at the end of the heating wire. The invention further discloses a manufacturing method of the MEMS silicon-based hole cavity atomizing core. Compared with the prior art, the atomization core is good in oil locking performance, high in machining yield, large in atomization heating area and high in temperature uniformity during heating, and materials are harmless to human bodies.

Description

technical field [0001] The invention belongs to the field of heat-generating atomizing cores, and in particular relates to a MEMS silicon-based cavity atomizing core and a manufacturing method thereof. Background technique [0002] As the core component of the liquid atomization product, the heating atomizing core heats the liquid to make it emit in the form of mist aerosol. When the atomizing element heats the atomized liquid, it should be fast, uniform, consistent, delicate and as far as possible Reduce the production of harmful substances. [0003] The existing liquid heating atomizing cores mainly include the following two types: cotton-wrapped atomizing cores and porous ceramic atomizing cores. The metal heating wire in the cotton-wrapped atomizing core is in direct contact with the cotton core. At high temperatures, the metal components in the heating wire and the debris of the cotton core material may be carried by the aerosol formed by atomization and inhaled by the...

AI Technical Summary

Problems solved by technology

[0007] 3. The thermal conductivity of the ceramic core is low and uneven. It is impossible for the metal heating wire to cover the entire atomization surface, which makes it difficult to increase the amount of atomization, and the local temperature is easy to be too high, causing dry burning

[0008] 4. The ceramic sintering process will inevitably introduce harmful substances and endanger the health of users

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