Scorpion-like slit pressure sensor and manufacturing method thereof
A technology of a pressure sensor and a manufacturing method, applied in the field of sensors, can solve the problems of small output signal and low electromechanical conversion efficiency, etc., and achieve the effect of improving electromechanical conversion efficiency and increasing self-supply of energy.
Active Publication Date: 2022-03-22
JILIN UNIV +1
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Problems solved by technology
[0004] The present invention provides a pressure sensor imitating a scorpion slit and its manufacturing method, aiming to solve the problem of low electromechanical conversion efficiency and relatively low output signal in the pressure sensor in the prior art. Small can not achieve self-supply and other issues
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[0054] In order to better explain the present invention and facilitate understanding, the present invention will be described in detail below through specific embodiments in conjunction with the accompanying drawings.
[0055] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the accompanying drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.
[0056] In addition, in the present invention, descriptions such as "first", "second" and so on are used for description purposes only, and should not be understood as indicating or implying their relative importance or implicitly indicating the quantity of indicated technical features. Thus, the features defined as "first" and "second" ma...
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Abstract
The invention relates to a scorpion-like slit pressure sensor and a manufacturing method thereof. The scorpion-like slit pressure sensor comprises a silicon substrate and a piezoelectric element installed on the silicon substrate. A strip-shaped slit is formed in the edge of the silicon substrate in the length direction, and first principal stress at the outline of the silicon substrate in a stress field at the bottom of the strip-shaped slit is perpendicular to the outline of the silicon substrate. Wherein the first principal stress of a certain point in the stress field is the maximum stress in all stresses of the point. Therefore, when one side of the strip-shaped slit on the silicon substrate is deformed, the first principal stress in the stress field at the bottom of the strip-shaped slit is consistent with the polarization direction of the piezoelectric element, so that the piezoelectric element can be greatly deformed, the electromechanical conversion efficiency of the piezoelectric element is further improved, and an output signal is increased to realize self-energy supply.
Description
technical field [0001] The invention relates to the field of sensors, in particular to a pressure sensor imitating a scorpion slit and a manufacturing method thereof. Background technique [0002] Sensors tend to be miniaturized, integrated, readable, low-power, and self-powered, among which the capabilities of miniaturization, integration, readability, and low power can be realized by MEMS (Micro-Electro-Mechanical System) , while self-energy can be realized by piezoelectric materials. The function of the pressure sensor based on the piezoelectric material is to collect the pressure signal, and the pressure signal can also be used as the energy source of the sensor after being electromechanically converted by the piezoelectric material. For this kind of self-powered sensor, it is hoped that it can generate higher energy by collecting pressure signals, and at the same time, it is hoped that the components for converting signals and recording signals consume less energy. Ex...
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IPC IPC(8): G01L1/16G01L9/08
CPCG01L1/16G01L9/08
Inventor 张俊秋李浩然王可军韩志武孙涛辛青青陈豫赵厚琦侯涛牛士超穆正知李博
Owner JILIN UNIV