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Mask plate manufacturing method and mask plate

A manufacturing method and a technology of a mask plate, which are applied in semiconductor/solid-state device manufacturing, ion implantation plating, coating, etc., can solve the problem of large sagging of mask strips, etc.

Active Publication Date: 2022-03-29
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present application provides a mask making method and a mask, which can solve the technical problem of large sagging of the mask strips of the large-size mask

Method used

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  • Mask plate manufacturing method and mask plate
  • Mask plate manufacturing method and mask plate
  • Mask plate manufacturing method and mask plate

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Embodiment Construction

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application. In addition, it should be understood that the specific implementations described here are only used to illustrate and explain the present application, and are not intended to limit the present application. In this application, unless stated to the contrary, the used orientation words such as "up" and "down" usually refer to up and down in the actual use or working state of the device, specifically the direction of the drawing in the drawings ; while "inside" and "outside" refer to the outline of ...

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Abstract

The embodiment of the invention discloses a manufacturing method of a mask plate and the mask plate, a positioning skeleton is temporarily fixed on a frame, then a first mask strip is fixedly connected to the frame, and the first mask strip abuts against the positioning skeleton, that is, the positioning skeleton is used for supporting the first mask strip, so that the first mask strip can be prevented from excessively drooping; then arranging a second mask strip on the frame and the first mask strip, wherein the second mask strip is fixedly connected to the frame and the first mask strip; and finally, the positioning skeleton is detached from the frame, so that the mask plate is manufactured.

Description

technical field [0001] The present application relates to the display field, in particular to a method for manufacturing a mask and the mask. Background technique [0002] Organic Light Emitting Display (OLED) devices are self-illuminating, all-solid-state, low driving voltage, high luminous efficiency, short response time, high definition and contrast, nearly 180° viewing angle, wide operating temperature range, and can realize With many advantages such as flexible display and large-area full-color display, it is recognized by the industry as the display device with the most development potential. At present, in order to achieve high-volume production of large-size OLEDs, continuous coating equipment must be used. In order to improve the utilization rate of large-size substrates, it is necessary to mix and match large-size substrates with different size product combinations, that is, mixed-cut substrate technology (MutilMoudel Group, MMG) to improve panel utilization; at t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/164H10K71/166
Inventor 谭伟
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD