Recovery system and method for nitrous oxide in nitrogen trifluoride gas

A technology of nitrous oxide and nitrogen trifluoride, which is applied in the fields of nitrous oxide, chemical instruments and methods, nitrogen oxides/oxyacids, etc., and can solve problems such as environmental pollution and waste of resources

Pending Publication Date: 2022-04-08
天津海嘉斯迪新材料合伙企业(有限合伙)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above method utilizes the property that nitrous oxide is soluble in water, but when the aqueous solution or alkali solution rich in nitrous oxide is heated, it can release dissolved nitrous oxi

Method used

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  • Recovery system and method for nitrous oxide in nitrogen trifluoride gas

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Experimental program
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Embodiment 1

[0065] use figure 1 The recovery system shown is for the recovery of nitrous oxide in nitrogen trifluoride:

[0066] In the nitrogen trifluoride rectification process, nitrous oxide is continuously enriched in the nitrogen trifluoride rectification and weight removal tower, and when the volume fraction of nitrous oxide in the tower liquid reaches 60-80%, it is intermittently transferred to the crude product container 1 collection. Utilize the first condenser 12 in the crude product container 1, control the temperature of low-temperature liquefaction at -110°C, and control the pressure at 0.1 to 0.3 MPa for receiving; . At this temperature and pressure, nitrous oxide exists as a solid and nitrogen trifluoride exists as a gas. When the pressure reaches or approaches 0.3 MPa, open the discharge valve at the top of the crude product container 1 to release the pressure to 0.1 MPa to the nitrogen trifluoride crude product gas holder. When the receiving volume of the crude produc...

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Abstract

The invention belongs to the technical field of tail gas treatment, and provides a system and a method for recovering nitrous oxide in nitrogen trifluoride gas. According to the recycling system, crude gas containing nitrous oxide from a nitrogen trifluoride rectifying tower is liquefied at a low temperature through a first condenser (12) and collected in a crude product container (1), and when a nitrous oxide liquefaction system contained in the nitrogen trifluoride rectifying tower reaches a certain amount, nitrogen trifluoride liquid rich in nitrous oxide is formed; a first heater (11) is utilized to gasify nitrogen trifluoride liquid rich in nitrous oxide, nitrogen trifluoride is gasified while nitrous oxide still exists in a liquid form, nitrogen trifluoride gas returns to an original nitrogen trifluoride process, the nitrous oxide liquid sequentially enters a rectification light component removal tower (2) and a rectification heavy component removal tower (3) to sequentially remove light components and heavy components, and pure nitrous oxide gas is obtained; the pure nitrous oxide gas enters the finished product container (4) to be condensed, pure nitrous oxide liquid is obtained, and the purpose of recycling nitrous oxide from nitrogen trifluoride gas is achieved.

Description

technical field [0001] The invention relates to the technical field of tail gas treatment, in particular to a system and method for recovering nitrous oxide in nitrogen trifluoride gas. Background technique [0002] Nitrogen trifluoride (NF 3 ) is a colorless and odorless gas, mainly used in the microelectronics industry as an excellent plasma etchant and cleaning agent. At present, electrolysis and chemical synthesis are often used in industry to prepare nitrogen trifluoride, and the crude nitrogen trifluoride obtained by these two methods contains a small amount of nitrous oxide (N 2 O) Impurities. [0003] The crude gas containing nitrous oxide in the nitrogen trifluoride production process undergoes a series of purification operations, such as: oxidation, water washing, alkali washing, adsorption and rectification, etc., to remove a large amount of acidic impurities, nitrogen, oxygen, hydrogen fluoride and other components , and finally get more than 99.999% high-puri...

Claims

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Application Information

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IPC IPC(8): B01D5/00B01D3/14C01B21/083C01B21/22
Inventor 王兆敏
Owner 天津海嘉斯迪新材料合伙企业(有限合伙)
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