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Microfluidic device and manufacturing method thereof

A technology of microfluidic devices and manufacturing methods, applied in printing and other directions, to achieve the effects of reasonable design, improved reliability, and reduced manufacturing costs

Pending Publication Date: 2022-04-19
武汉敏捷微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The formation and performance of inkjet are affected by many factors, such as heater material, cavity size, ink channel design, nozzle size, ink properties, condensation of vapor bubbles, etc. However, the existing print head manufacturing process It can be further improved to improve the reliability of the print head and reduce the manufacturing cost of the print head

Method used

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  • Microfluidic device and manufacturing method thereof
  • Microfluidic device and manufacturing method thereof
  • Microfluidic device and manufacturing method thereof

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Embodiment Construction

[0028] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0029] see Figure 1 to Figure 4 , the present invention provides a technical solution: a microfluidic device, including a device wafer 1 and a nozzle wafer 2, the device wafer 1 includes a substrate 10, an insulating layer 3 and a heater 4, and the insulating layer 3 Set on the top of the substrate 10, the heater 4 is set on the top of the insulating layer 3, the top of the insulating layer 3 is provided with metal wires 5 at the positions on both sides of the heater 4, the insulating layer 3, the metal The top of the wire 5 and the heater 4 is provided with a passivation layer 6, and the nozzle wafer 2 includes a silicon chip 7, and a cavity 8 is opened at the bottom of the silicon chip 7, and the center position of the inner wall of the top of ...

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Abstract

The invention provides a microfluid device and a manufacturing method thereof, the microfluid device comprises a device wafer and a nozzle wafer, the device wafer comprises a substrate, an insulating layer and a heater, the insulating layer is arranged at the top of the substrate, the heater is arranged at the top of the insulating layer, metal wires are arranged at the positions, located on the two sides of the heater, of the top of the insulating layer, and the nozzle wafer is arranged on the substrate. The top of the insulating layer, the top of the metal wire and the top of the heater are provided with passivation layers, the nozzle wafer comprises a silicon wafer, the bottom of the silicon wafer is provided with a cavity, the center of the inner side wall of the top of the cavity is provided with a nozzle, and the positions of the nozzle and the cavity correspond to the position of the heater. The manufacturing process of the printing head is further improved, the reliability of the printing head is improved, and the manufacturing cost of the printing head is reduced.

Description

technical field [0001] The invention belongs to the technical field of printer manufacture, and in particular relates to a microfluidic device and a manufacturing method thereof. Background technique [0002] Thermal inkjet printing technology is increasingly used in industrial, commercial and consumer printing applications. In the thermal inkjet process, the print cartridge consists of a series of tiny chambers, each containing a heater. To eject an ink droplet from each chamber, a pulse of current is passed through a heating element, causing the ink in the chamber to rapidly vaporize and form bubbles, causing pressure in the chamber to increase, ejecting the ink droplet from the nozzle onto the paper, completing the print. [0003] The continuous evolution of thermal inkjet print head technology has increased the firing speed of each chamber from the original 5-8khz to more than 20khz, and the ink drop volume has reached 5 picoliters. The formation and performance of inkj...

Claims

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Application Information

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IPC IPC(8): B41J2/14B41J2/16
CPCB41J2/14B41J2/1621B41J2/1631
Inventor 樊永辉陈诚
Owner 武汉敏捷微电子有限公司
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