Liquid ejector nozzle and its producing method, and method for making micro mechanical device
A liquid discharge head and micro-mechanical technology, which is applied in the direction of inking devices, metal processing equipment, printing, etc., can solve problems such as uneven substrates, difficulty in obtaining the upper surface of wall parts, and difficulty in forming thick films.
Inactive Publication Date: 2004-03-31
CANON KK
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Problems solved by technology
[0019] However, in reference to Figure 15 In the described manufacturing method, the nozzle wall part 2010 must be precisely connected into the base plate 2004, and in addition, the upper surface of the nozzle wall part 2010 must be flattened before the top plate 2001 is connected, so this manufacturing step is very troublesome
[0020] In addition, when the wall member is made of an organic material, if a dry film is used, a thick film of the above-mentioned thickness can be formed, but as described above, the surface of the substrate will be uneven, so not only is it difficult to obtain a flat surface on the wall member. surface, and there is also concern that the movable parts will be deformed by the dry film
In addition, it is difficult to form a thick film with a thickness of tens of micrometers using the traditional wet process
Method used
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[0050] As a suitable embodiment of the present invention, a liquid discharge head having a plurality of liquid discharge ports will be described below. A first substrate and a second substrate are connected to each other to form a plurality of liquid flow channels. These The liquid flow channel communicates with the corresponding discharge port, and a plurality of energy conversion elements are arranged on the corresponding liquid flow channel for converting electrical energy into the discharge energy of the liquid on the liquid flow channel, and a plurality of components or circuits with different functions from each other For controlling the driving conditions of the energy conversion element, the plurality of elements or circuits having different functions from each other are allocated to the first substrate and the second substrate according to their functions.
[0051] figure 1 It is a cross-sectional view along a liquid flow channel, which shows a liquid discharge head ...
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Abstract
A method of manufacturing a liquid discharge head having a discharge opening for discharging liquid droplets therefrom, a wall member constituting a liquid flow path communicating with the discharge opening to supply liquid to the discharge opening, a substrate provided with a bubble creating element for creating a bubble in the liquid, and a movable member supported by and fixed to the substrate with the discharge opening side thereof as a free end and provided at a position facing the bubble creating element in the liquid flow path with a gap between it and the substrate, the free end of the movable member being displaced away from the substrate by pressure produced by creating the bubble to thereby direct the pressure to the discharge opening side and discharge the droplet of the liquid from the discharge opening, has the steps of preparing the substrate provided with the movable member, filling the gap between the movable member and the substrate with liquid photo-curing resin, and applying the resin to the substrate by spin coating until it covers the movable member, exposing that area of the photo-curing resin which excludes an area including at least the liquid flow path to light to thereby harden a portion corresponding to the wall member, and removing the unexposed portion of the photo-curing resin to thereby form the movable member in the liquid flow path.
Description
technical field [0001] The present invention relates to a liquid discharge head for discharging a desired liquid, which discharges the desired liquid by generating bubbles on said liquid by the action of thermal energy, and also relates to a method for producing said liquid. Method of liquid discharge head In particular, the present invention relates to a method of producing a liquid discharge head having a movable member which is moved by the action of said generated air bubbles, and also It relates to a liquid discharge head made by the method and a method of manufacturing a micromechanical device. [0002] The present invention can be applied to some apparatuses such as printers to complete recording on recording media such as paper, yarn, fiber, cloth, metal, plastic, glass, wood and ceramics; for example, it is applied to replicators; it is applied to having a communication system and In a facsimile apparatus of a word processor, the word processor has a printer unit; it...
Claims
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IPC IPC(8): B41J2/135B41J2/16
CPCB41J2/1623Y10S29/016B41J2/1604B41J2/1646B41J2/1628B41J2/14048B41J2/1642B41J2202/13B41J2/1631B41J2/1645B41J2/1635Y10T29/49083Y10T29/49401B41J2/135
Inventor 铃木良明田川义则宫川昌士渡边诚益川竜也栗原香晓饭岛康
Owner CANON KK