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Metrology system with projected pattern for out-of-focus process

A metering system, technology of projected patterns, applied in the field of Z height of points

Pending Publication Date: 2022-05-06
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This is especially challenging for Z height measurements

Method used

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  • Metrology system with projected pattern for out-of-focus process
  • Metrology system with projected pattern for out-of-focus process
  • Metrology system with projected pattern for out-of-focus process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] figure 1 is a block diagram of an exemplary machine vision inspection system 10 that may be used as a metrology system and / or imaging system, according to principles described herein. The machine vision inspection system 10 includes a vision measuring machine 12 operatively connected to exchange data and control signals with a control computer system 14 . Control computer system 14 is further operatively connected to exchange data and control signals with monitor or display 16 , printer 18 , joystick 22 , keyboard 24 and mouse 26 . Monitor or display 16 may display a user interface suitable for controlling and / or programming the operation of machine vision inspection system 10 . It should be understood that in various implementations, a touchscreen tablet or other computing element or the like may alternatively and / or redundantly provide the functionality of any or all of elements 14 , 16 , 22 , 24 , and 26 .

[0029] Those skilled in the art will appreciate that cont...

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PUM

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Abstract

A metrology system is provided that includes a projection pattern for an out-of-focus process. The metering system comprises an objective lens part, a light source, a pattern projection part and a camera. Different lenses (e.g., objective lenses) with different magnifications and cut-off frequencies may be used in the system. The pattern projection portion includes a pattern component having a pattern. At least a majority of a region of the pattern includes pattern portions that do not appear repeatedly on the pattern at regular intervals (e.g., different frequency spectra corresponding to spatial frequencies that produce a relatively flat power spectrum within a desired range and may be utilized with different lenses having different cutoff frequencies). The pattern is projected on the workpiece surface (e.g., for generating contrast), and an image stack is acquired from which focus curve data indicative of three-dimensional positions of points of the workpiece surface is determined.

Description

technical field [0001] The present disclosure relates to precision metrology using non-contact workpiece surface measurements (eg, in machine vision inspection systems), and more particularly, to a process for determining the Z-height of a point on a workpiece surface. Background technique [0002] Sophisticated non-contact metrology systems such as precision machine vision inspection systems (or simply "vision systems") can be used to obtain precise dimensional measurements of objects and inspect various other object characteristics, and can include computers, cameras, and optical systems, as well as mobile A precision table that allows workpiece traversal and inspection. An exemplary prior art is the PC-based QUICK available from Mitutoyo America Corporation (MAC), Aurora, Illinois. series of vision systems and software. QUICK series of vision systems and The features and operation of the software are generally described, for example, in the QVPAK 3D CNC Vision Me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B11/25
CPCG01B11/2433G01B11/254G02B21/025G02B21/367G01B11/24G01B11/2513H04N23/673H04N23/676G06T7/571G06T7/521G06T2207/10148G06T2207/30164G06T2207/10028H04N23/56H04N23/959
Inventor S.R.坎贝尔L.雷德拉斯基
Owner MITUTOYO CORP