Wafer conveying system and wafer conveying method

Abstract

The invention discloses a wafer transfer system and a wafer transfer method. According to the embodiment of the invention, the wafer conveying system comprises a wafer conveying box used for placing a wafer to be conveyed; the bearing unit is used for being connected with the wafer conveying box so as to bear the wafer conveying box; the transfer unit is used for obtaining the wafers to be conveyed from the wafer conveying box and transferring the wafers to the base station; and the base station is used for receiving the wafer to be conveyed. According to the wafer conveying system and the wafer conveying method provided by the embodiment of the invention, the productivity per hour and the processing effect of the wet-process batch processor are improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a wafer delivery system and a wafer delivery method. Background technique [0002] At present, in semiconductor manufacturing, a wafer (wafer) must go through a process flow consisting of hundreds of processes in sequence before it can be made into a final product. A batch of wafers produced by the same process flow can be called a chip group (Lot). When the current processes of different Lots are the same, different Lots can be dispatched to the same machine for processing, and a machine capable of processing multiple Lots at the same time is called a batch processing (Batch) machine. [0003] In the existing semiconductor process, the wet batch processor in the wet process can process up to 50 wafers at a time. The hourly capacity (Wafer Per Hour, WPH) of the wet batch processor is mainly related to the time of the process, but when the process time is sho...

AI Technical Summary

Problems solved by technology

[0004] 1. There are many transmission contact points, and it is difficult to find the cause of problems;

[0005] 2. The transmission speed is slow;

[0006] 3. The rotation speed of the bearing unit to generate batches is relatively slow;

[0007] 4. High requirements for equipment;

[0008] 5. The transmission speed is slow after the equipment takes out the wafer

[0009] The above-mentioned problems existing in the conveying mode of the existing wet batch processing machine will seriously affect the hourly production capacity

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