Automatic liquid spraying protection test system applied to probe station

Abstract

The invention discloses an automatic liquid spraying protection test system applied to a probe station, which comprises the probe station, a test port is formed in the middle of the probe station, a vacuum chuck for adsorbing a device to be tested is arranged at the lower end of the test port, and a plurality of test probe modules are fixed on the periphery of the upper end of the test port; a liquid spraying module is further fixed to the periphery of the upper end of the testing opening and comprises a liquid sprayer, the liquid sprayer is arranged above the testing opening and sprays insulating liquid to the to-be-tested device, the liquid spraying module controls the liquid spraying time, the liquid spraying interval time and the liquid spraying mode through a controller, the controller communicates with a computer, and the computer comprises control software. The control software communicates with the controller through the computer so as to control the liquid sprayer. Through cooperation of software and hardware, automatic liquid spraying of the liquid sprayer can be realized, insulating liquid can be automatically sprayed onto a high-power device Pad, a probe and a to-be-tested device are protected before and after needle contact, and damage caused by high-voltage breakdown ignition is avoided.

Description

technical field [0001] The invention relates to the technical field of integrated circuit testing, in particular to an automatic liquid spray protection testing system applied to a probe station. Background technique [0002] With the development of high-power equipment such as high-speed rail locomotives and new energy vehicles, the demand for high-power semiconductor devices has also expanded, and the requirements for high-power device yields have also become higher and higher. Therefore, it is particularly important to improve the efficiency of high-power testing. The test of high-power devices needs to apply high voltage and high current, and the applied voltage of conventional high-power tests can also reach 3000V. At this time, the test will be very dangerous, so protective measures should be added during the test, such as arranging protection outside the probe station cover. However, in a high-voltage and high-current environment, breakdown and ignition may occur be...

AI Technical Summary

Problems solved by technology

This protection method has great limitations: ①The device cannot be fixed if it is placed in the insulating liquid; ②The depth of the card slot should not be too deep, which will make it extremely inconvenient to take out the device; ③The distance between the inner edge of the card slot and the device There must be a gap between them and the device cannot be effectively pressed, and the device cannot be fixed firmly; ④The device itself is warped, which affects the test accuracy; ⑤Cannot perform automatic film running test, and the test efficiency is low

Images