Distortion and aberration correction processing apparatus, distortion and aberration correction method, and storage medium

Abstract

The invention provides a distortion correction processing device which can perform distortion correction with high precision even in a state that the optical axis of an imaging device is inclined relative to the surface of an object to be measured. The storage unit stores distortion correction information indicating a relationship between a coordinate correction rate for correcting coordinates on an image plane and a distance from a reference point for each of a plurality of segments divided by a plurality of boundary lines radially extending from the reference point on the image plane of the imaging device. The processing unit selects at least one section from the plurality of sections on the basis of the coordinates of the portion to be corrected in the image plane, and determines a coordinate correction rate on the basis of the distortion correction information of the selected section and the distance from the reference point to the portion to be corrected. And corrects the coordinates of the portion to be corrected on the basis of the determined coordinate correction rate.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2020-178944 filed on October 26, 2020. The entire content of this Japanese application is incorporated in this specification by reference. technical field [0002] The invention relates to a distortion aberration correction processing device, a distortion aberration correction method and a storage medium. Background technique [0003] Inkjet devices that draw ink by dropping ink from an inkjet head onto an object, laser processing devices that impinge a laser beam on an object to perform drilling, and inject a laser beam on a semiconductor substrate as an object In a laser annealing device or the like that performs annealing on an object, the alignment mark provided on the object is detected to position the object. At this time, the position of the alignment mark is detected by performing image processing on an image captured with the alignment mark. [0004] In order to detect the position of...

AI Technical Summary

Problems solved by technology

However, in the correction method disclosed in Patent Document 1, the distortion is corrected only by the distance from the origin of the image plane, and thus the distortion aberration cannot be corrected with high accuracy in a state where the optical axis of the imaging device is tilted.

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