A three-direction precision compensation structure of xyz axis suitable for precision handling mechanism
A handling mechanism and precision compensation technology, applied in metal processing machinery parts, metal processing equipment, manufacturing tools, etc., can solve the problems of affecting the structural accuracy and strength, vacuum leakage, and high cost, and improve the handling success rate and relative position accuracy. , Compensate the effect of machining accuracy
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[0027] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0028] like figure 1 and figure 2 As shown, an XYZ axis three-direction precision compensation structure suitable for a precision handling mechanism of the present invention includes a mechanism upper mounting plate 5 , a mechanism lower mounting plate 6 , a guide assembly 20 , an elastic plunger 1 , and a top tightening screw 4 .
[0029] The upper mounting plate 5 of the mechanism is arranged in parallel with the lower mounting plate 6 of the mechanism, and the upper mounting plate 5 of the mechanism is provided with a guide assembly 20 and an elastic pl...
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