Separation device and separation method of electronic-grade chlorine trifluoride

A chlorine trifluoride and separation device technology, which is applied in the direction of separation methods, chemical instruments and methods, distillation separation, etc., can solve problems such as the inability to completely solve the problem of multi-polymer separation, and the difficulty in preparing chlorine trifluoride

Active Publication Date: 2022-05-27
FUJIAN DEER TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This is because chlorine trifluoride is very easy to associate with hydrogen fluoride to form multipolymers with special intermolecular forces, and traditional separation methods cannot completely solve the separation problem of multipolymers
Therefore, it is difficult to prepare electronic grade chlorine trifluoride

Method used

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  • Separation device and separation method of electronic-grade chlorine trifluoride
  • Separation device and separation method of electronic-grade chlorine trifluoride
  • Separation device and separation method of electronic-grade chlorine trifluoride

Examples

Experimental program
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Effect test

Embodiment 1

[0033] An electronic grade chlorine trifluoride rectification device, comprising: a secondary cryogenic rectification device, the secondary cryogenic rectification device comprises a low boiling column and a high boiling column, and the secondary cryogenic rectification device is provided with a Extractant for discrete hydrogen fluoride and chlorine trifluoride associated molecules to meet the requirements of electronic grade chlorine trifluoride. The low-boiling tower includes a first reboiler, a first low-boiling tower packing section, a second low-boiling tower packing section and a first condenser in sequence from bottom to top. The high-boiling tower sequentially includes a second reboiler, a first high-boiling tower packing section, a second high-boiling tower packing section, a third high-boiling tower packing section and a second condenser from bottom to top. An extraction agent is arranged in each packing section for further discretizing the associated molecules of hy...

Embodiment 2

[0036] The present invention further provides the rectification method of the above-mentioned electronic grade chlorine trifluoride rectification device, the rectification device includes the technical features in the embodiment 1, and the method comprises the following steps:

[0037] S1, control the temperature of the second-layer tray at the upper end of the first reboiler to be 10-12°C, and the temperature of the second-layer tray at the lower end of the first condenser to be -22.5-24°C;

[0038] S2, the temperature at the upper end of the second reboiler is controlled to be 11-12°C, and the temperature at the lower end of the second condenser is controlled to be -6--4°C.

Embodiment 3

[0040] refer to figure 1 As shown, the present invention provides an electronic-grade chlorine trifluoride purification system, comprising: a first Hastelloy condenser 11, a first Hastelloy heating tank 12, and a Hastelloy pressure-resistant heating tank that are connected in sequence 13. The 3-stage metal adsorbent bed 14, the rectification device of electronic grade chlorine trifluoride in Example 1, the liquefaction tank 16 and the pressure-stabilizing tank 17.

[0041] The feed end of the first Hastelloy condenser 11 is set at its top end and communicated with the reactor 10, and the discharge end of the first Hastelloy condenser 11 is set at its bottom end and communicated with the first Hastelloy condenser 11. A Hastelloy warming tank 12 is connected to the feed end. The first Hastelloy condenser 11 is used for condensing the crude chlorine trifluoride product produced by the reactor 10, so as to provide power to the outlet gas of the reactor 10 through the temperature ...

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Abstract

The invention provides a separation device and a separation method of electronic-grade chlorine trifluoride. The separation method comprises the following steps: S1, heating an alkali metal adsorbent in the three-stage metal adsorbent layer bed, so that the alkali metal adsorbent and hydrogen fluoride molecules are associated to form a firmer hydrogen bond for separation, and primary purification is realized; and S2, further dispersing associated molecules of hydrogen fluoride and chlorine trifluoride through the second-stage low-temperature rectification device to realize second-stage purification.

Description

[0001] Divisional Application Statement [0002] This application is a divisional application of the Chinese invention patent application with the application number 202110127961.9 filed on 2021-01-29 and the invention title is "Control Method of Electronic Grade Chlorine Trifluoride Rectification and Purification System". technical field [0003] The invention relates to a separation device and a separation method of electronic grade chlorine trifluoride. Background technique [0004] Currently, in the world, only the United States and Japan can produce electronic grade chlorine trifluoride. In China, only industrial-grade chlorine trifluoride can be produced, and there is no ability to prepare electronic-grade chlorine trifluoride. This is because chlorine trifluoride is very easy to associate with hydrogen fluoride to form a multipolymer with special intermolecular force, and the traditional separation method cannot completely solve the separation problem of the multipol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/24B01D3/14B01D3/32B01D3/42
CPCC01B7/24B01D3/143B01D3/324B01D3/322B01D3/42Y02P20/10Y02P20/50C07C17/389C07C17/386C07C19/10
Inventor 李向如李纪明李嘉磊陈施华申黎明于睿洁吴强
Owner FUJIAN DEER TECH CORP
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