Separation device and separation method of electronic-grade chlorine trifluoride
A chlorine trifluoride and separation device technology, which is applied in the direction of separation methods, chemical instruments and methods, distillation separation, etc., can solve problems such as the inability to completely solve the problem of multi-polymer separation, and the difficulty in preparing chlorine trifluoride
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Embodiment 1
[0033] An electronic grade chlorine trifluoride rectification device, comprising: a secondary cryogenic rectification device, the secondary cryogenic rectification device comprises a low boiling column and a high boiling column, and the secondary cryogenic rectification device is provided with a Extractant for discrete hydrogen fluoride and chlorine trifluoride associated molecules to meet the requirements of electronic grade chlorine trifluoride. The low-boiling tower includes a first reboiler, a first low-boiling tower packing section, a second low-boiling tower packing section and a first condenser in sequence from bottom to top. The high-boiling tower sequentially includes a second reboiler, a first high-boiling tower packing section, a second high-boiling tower packing section, a third high-boiling tower packing section and a second condenser from bottom to top. An extraction agent is arranged in each packing section for further discretizing the associated molecules of hy...
Embodiment 2
[0036] The present invention further provides the rectification method of the above-mentioned electronic grade chlorine trifluoride rectification device, the rectification device includes the technical features in the embodiment 1, and the method comprises the following steps:
[0037] S1, control the temperature of the second-layer tray at the upper end of the first reboiler to be 10-12°C, and the temperature of the second-layer tray at the lower end of the first condenser to be -22.5-24°C;
[0038] S2, the temperature at the upper end of the second reboiler is controlled to be 11-12°C, and the temperature at the lower end of the second condenser is controlled to be -6--4°C.
Embodiment 3
[0040] refer to figure 1 As shown, the present invention provides an electronic-grade chlorine trifluoride purification system, comprising: a first Hastelloy condenser 11, a first Hastelloy heating tank 12, and a Hastelloy pressure-resistant heating tank that are connected in sequence 13. The 3-stage metal adsorbent bed 14, the rectification device of electronic grade chlorine trifluoride in Example 1, the liquefaction tank 16 and the pressure-stabilizing tank 17.
[0041] The feed end of the first Hastelloy condenser 11 is set at its top end and communicated with the reactor 10, and the discharge end of the first Hastelloy condenser 11 is set at its bottom end and communicated with the first Hastelloy condenser 11. A Hastelloy warming tank 12 is connected to the feed end. The first Hastelloy condenser 11 is used for condensing the crude chlorine trifluoride product produced by the reactor 10, so as to provide power to the outlet gas of the reactor 10 through the temperature ...
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