Surface acoustic wave resonator, method for manufacturing same, and surface acoustic wave filter
A surface acoustic wave and resonator technology, applied in the field of surface acoustic wave devices, can solve the problems of inability to obtain high-performance surface acoustic wave filters, poor quality factor resistance to power, low film flatness, etc., and achieve high effective electromechanical Effects of coupling coefficient, good TCF characteristics and power resistance, and high breakdown field strength
Pending Publication Date: 2022-06-03
GUANGDONG CANCHIP TECH CO LTD
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0008] However, the single crystal piezoelectric film needs to be grown at a high temperature above 1000°C, and the obtained film has low flatness and is easy to break. The surface acoustic wave resonator prepared by using such a film will have quality factors such as Q, TCF and power resistance. Due to the disadvantage of poor performance, it is impossible to obtain a high-performance surface acoustic wave filter
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0046] The present invention will be described in more detail below with reference to specific embodiments shown in the accompanying drawings. Various advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the specific embodiments. It should be understood, however, that the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. The following embodiments are provided in order to enable a more thorough understanding of the present invention. Unless otherwise specified, technical or scientific terms used in the present application shall have the ordinary meanings understood by those skilled in the art to which the present application belongs.
[0047]
[0048] figure 1 is a schematic diagram of the structure of the surface acoustic wave resonator 10 according to the present invention. As shown in the figure, the su...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a surface acoustic wave resonator, a manufacturing method thereof and a surface acoustic wave filter. The surface acoustic wave resonator has a high quality factor Q, a high electromechanical coupling coefficient and good TCF characteristics and power resistance. The surface acoustic wave resonator according to the present invention comprises: a composite piezoelectric substrate having a SiC base layer and a ZnO piezoelectric layer formed on the SiC base layer, the ZnO piezoelectric layer being formed from a c-axis preferentially oriented single crystal ZnO; and the interdigital electrode is formed on the ZnO piezoelectric layer.
Description
technical field [0001] The present invention relates to the technical field of surface acoustic wave devices. More specifically, it relates to a surface acoustic wave resonator using a composite piezoelectric substrate, a method for manufacturing the same, and a surface acoustic wave filter Background technique [0002] A surface acoustic wave (SAW: surface acoustic wave) device is an electronic device based on the piezoelectric effect of a piezoelectric material, using the surface acoustic wave on the surface of the piezoelectric material, which uses an interdigital transducer ( IDT: interdigital transducer) converts electrical input signals into surface acoustic waves. [0003] SAW devices have the characteristics of small size, light weight, high reliability and stable operation in harsh environments. They have been widely used in various communication equipment, data transmission equipment, audio-visual equipment and positioning and navigation equipment. In particular,...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More IPC IPC(8): H03H9/02H03H9/25H03H9/64H03H3/10
CPCH03H9/02574H03H9/02834H03H9/25H03H9/64H03H3/10
Inventor 许欣
Owner GUANGDONG CANCHIP TECH CO LTD