Bulk acoustic wave resonator and semiconductor device

A bulk acoustic wave resonator and cavity technology, applied in electrical components, impedance networks, etc., can solve problems such as performance parameter decline, and achieve the effect of improving the acoustic impedance ratio, reducing loss, and making up for the reduction of Qsw.
CN110868184APending Publication Date: 2020-03-06THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
Publication Date
2020-03-06

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Abstract

The invention relates to the technical field of semiconductors, and discloses a bulk acoustic wave resonator and a semiconductor device. The bulk acoustic wave resonator comprises a substrate; and a multi-layer structure which is formed on the substrate, wherein the multi-layer structure sequentially comprises a lower electrode layer, a doped piezoelectric layer and an upper electrode layer from bottom to top, a cavity is formed between the substrate and the multilayer structure, the electrode surface of at least one of the lower electrode layer and the upper electrode layer is provided with aconcave part extending towards the interior of the corresponding electrode layer and / or a convex part extending towards the exterior of the corresponding electrode layer, the doped piezoelectric layer includes a piezoelectric material doped with at least one rare earth element. According to the resonator, the cavity with the lower half cavity and the upper half cavity is arranged, the convex partand / or the concave part are / is arranged on the surface of the electrode layer, and the piezoelectric layer is doped with at least one rare earth element, so that a novel bulk acoustic wave resonatorstructure is formed, and the resonator has relatively good performance.
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Description

technical field

[0001] The invention relates to the technical field of semiconductors, in particular to bulk acoustic wave resonators and semiconductor devices. Background technique

[0002] Resonators may be used in various electronic applications to implement signal processing functions, for example, some cellular telephones and other communication devices use resonators to implement filters for transmitted and / or received signals. Several different types of resonators are used depending on the application, such as Film Bulk Acoustic Resonator (FBAR), Filter of Coupled Resonators (SBAR), Stacked Bulk Acoustic Resonator (SBAR), Dual Bulk Acoustic Resonator ( DBAR) and Solid State Mounted Resonators (SMR).

[0003] A typical acoustic resonator includes an upper electrode, a lower electrode, a piezoelectric material between the upper and lower electrodes, an acoustic reflective structure under the lower electrode, and a substrate under the acoustic reflective structure. The...

Claims

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