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Surface acoustic wave resonator, method for manufacturing same, and surface acoustic wave filter

A surface acoustic wave and resonator technology, applied in the field of surface acoustic wave devices, can solve problems such as poor passband characteristics of surface acoustic wave filters, achieve good TCF characteristics and power resistance, improve quality factors, and high quality factors Effect

Pending Publication Date: 2022-06-03
GUANGDONG CANCHIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] When using the above-mentioned piezoelectric materials, due to their high sensitivity to temperature and weak electromechanical coupling, the passband characteristics of the prepared SAW filter are not good.

Method used

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  • Surface acoustic wave resonator, method for manufacturing same, and surface acoustic wave filter
  • Surface acoustic wave resonator, method for manufacturing same, and surface acoustic wave filter
  • Surface acoustic wave resonator, method for manufacturing same, and surface acoustic wave filter

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Embodiment Construction

[0041] The present invention will be described in more detail below with reference to specific embodiments shown in the accompanying drawings. Various advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the specific embodiments. It should be understood, however, that the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. The following embodiments are provided in order to enable a more thorough understanding of the present invention. Unless otherwise specified, technical or scientific terms used in the present application shall have the ordinary meanings understood by those skilled in the art to which the present application belongs.

[0042] figure 1 is a schematic diagram of the structure of the surface acoustic wave resonator 10 according to the present invention. As shown in the figure, the surface acous...

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Abstract

The invention provides a surface acoustic wave resonator, a manufacturing method thereof and a surface acoustic wave filter. The surface acoustic wave resonator has a high quality factor Q, a high electromechanical coupling coefficient and good TCF characteristics and power resistance. The surface acoustic wave resonator according to the present invention comprises: a composite piezoelectric substrate having an LGS base layer formed from a single crystal LGS, and a ZnO piezoelectric layer formed on the LGS base layer, the ZnO piezoelectric layer being formed from a single crystal ZnO having a c-axis preferred orientation; and the interdigital electrode is formed on the ZnO piezoelectric layer.

Description

technical field [0001] The present invention relates to the technical field of surface acoustic wave devices. More specifically, it relates to a surface acoustic wave resonator using a composite piezoelectric substrate, a method for manufacturing the same, and a surface acoustic wave filter Background technique [0002] With the rapid development of information technology, especially in the field of wireless communication, the RF front-end widely used in various communication equipment, data transmission equipment, audio-visual equipment and positioning and navigation equipment is becoming more and more important. The RF front-end refers to the functional area between the RF transceiver and the antenna, which consists of power amplifiers, antenna switches, filters, duplexers, and low-noise amplifiers. In order to adapt to the rapid development of the communication field, higher requirements are put forward for various performances of the RF front-end. [0003] Surface acou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/64H03H3/08
CPCH03H9/02574H03H9/02834H03H9/64H03H3/08
Inventor 许欣
Owner GUANGDONG CANCHIP TECH CO LTD