Gas detection device suitable for low-pressure environment

Abstract

The invention discloses a gas detection device suitable for a low-pressure environment, which is characterized in that a gas inlet is formed in the top surface of a cavity, an incident light port is formed in the bottom surface of the cavity, a gas outlet is formed in the side surface of the cavity, an emergent light port is formed in the other side surface of the cavity, a first quartz plate is bonded outside the bottom surface of the cavity, and a filter is arranged on the bottom surface of the first quartz plate; the second quartz plate is bonded outside the side face of the cavity, the support is obliquely arranged in the cavity, the integrating sphere is erected in a center hole of the support, the integrating sphere is provided with an air vent, an incident light hole and an emergent light hole, and the center line of the incident light hole of the integrating sphere and the center line of the incident light hole of the cavity are in the same straight line. The center line of the integrating sphere emergent light hole and the center line of the cavity emergent light opening are in the same straight line, one end of the metal cylinder is connected with the integrating sphere emergent light hole, and the other end of the metal cylinder is inserted into the cavity emergent light opening. The problem that the gas concentration is difficult to detect under low pressure is solved, and compared with methods such as gas chromatography and mass spectrometry, the method is more convenient and lower in cost.

Description

technical field [0001] The invention belongs to the field of plasma discharge gas product detection, and in particular relates to a gas detection device suitable for low-pressure environments. Background technique [0002] At present, gas detection methods mainly include chemical methods and spectroscopic methods. Chemical methods include gas chromatography, mass spectrometry, and chemiluminescence detection methods. Chemical detection methods generally belong to single-point detection, and gas sampling is required. Chemical reagents have certain volatility. Generally not suitable for continuous and long-term detection. Compared with the chemical method, the spectroscopic method has the advantages of fast response, high sensitivity, strong anti-interference ability, no need for sampling, and the average concentration of gas in the area can be detected by a single measurement. According to Beer-Lambert's law, increasing the optical detection path can improve the gas detectio...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the existing technical problems, the present invention provides a gas detection device suitable for low pressure environment, which overcomes the difficulty of gas concentration detection under low pressure, And compared with gas chromatography, mass spectrometry and other methods, it is more convenient and inexpensive

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