Check patentability & draft patents in minutes with Patsnap Eureka AI!

Three-axis gyroscope

A gyroscope and Z-axis technology, applied in gyroscope/steering sensing equipment, instruments, gyro effect for speed measurement, etc., can solve the interference of test results, inaccurate test results, and the two-axis or three-axis test is not independent and other problems, to achieve the effect of simple connection, accurate detection results and good reliability

Active Publication Date: 2022-06-21
绍兴圆方半导体有限公司
View PDF13 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Existing three-axis gyroscopes usually have two-axis or three-axis tests that are not independent, and the movement of one axis interferes with the test results of the other axis, resulting in inaccurate test results

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Three-axis gyroscope
  • Three-axis gyroscope
  • Three-axis gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0041] It can be understood that the angular velocity Ωz can be calculated by any one of Cza, Czb, Czc and Czd. In this embodiment, the total capacitance difference Czb-Cza+Czd-Czc is used for calculation. On the one hand, the two capacitance differences ( Cza-Czb) and (Czd-Czc) can offset some systematic errors and improve detection accuracy. On the other hand, the sum of the two capacitance differences can double the signal and improve the detection sensitivity.

[0042] For the angular velocity Ω around the Z axis z detection of , as another example, see figure 1 and image 3 , image 3It is another kind provided by the embodiment of this application figure 1 The schematic diagram of the enlarged structure of part A in the middle, the second hollow part 301 is provided with a first isolation plate 34, which divides the second hollow part 301 into two sub-regions arranged along the X direction; the two Z-axis electrodes respectively extend to two sub-regions In the regi...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The three-axis gyroscope comprises a substrate, a first X / Z-axis detection mass block, a second X / Z-axis detection mass block, a first driving mass block and a second driving mass block, the Y-axis detection mass block comprises a first hollow part; the first driving mass block, the first X / Z-axis detection mass block, the second X / Z-axis detection mass block and the second driving mass block are sequentially arranged in the X direction, are elastically connected and are positioned in the first hollow part; the Y-axis detection mass block is elastically connected with the first driving mass block and the second driving mass block in the X direction. The first X / Z-axis detection mass block and the second X / Z-axis detection mass block do resonant motion in opposite directions along the Y direction and are used for detecting the angular velocity around the X axis and the angular velocity around the Z axis; and the Y-axis detection mass block performs reciprocating rotation motion in the XY plane and is used for detecting the angular velocity around the Y axis. According to the invention, the angular velocities of three axes are independently detected, the detection result is accurate, and the reliability is better.

Description

technical field [0001] The present application relates to the technical field of micro-electromechanical systems, in particular to a three-axis gyroscope. Background technique [0002] Micro-gyroscopes based on micro-electromechanical systems (Micro-Electro-Mechanical-System, MEMS) are used to measure rotational angular velocity. They have many advantages such as small size, low cost, good integration, and excellent performance. It is widely used in non-fields such as medical, military, etc. At present, it has also become a standard configuration in the application of various consumer electronic products such as mobile terminals, cameras, game controllers, and navigators. [0003] In existing three-axis gyroscopes, the tests of two or three axes are usually not independent, and the movement of one axis interferes with the test results of the other axis, resulting in inaccurate test results. Contents of the invention [0004] An embodiment of the present application provid...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01C19/5712
CPCG01C19/5712
Inventor 黄占喜周宁宁刘爽曲鹏黄克刚
Owner 绍兴圆方半导体有限公司
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com