Miniature electric field sensor
A kind of electric field sensor, miniature technology, applied in the direction of electromagnetic field characteristics, can solve the problem of inaccurate probe measurement, achieve the effect of small size, simple structure, high sensitivity to measure electric field
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[0038] like Figure 1 to Figure 3 As shown, a miniature electric field sensor includes:
[0039] The sensing electrode 2, which includes a first sensing electrode plate and a second sensing electrode plate that are disposed oppositely and isolated, is a comb-like structure;
[0040] Shielding electrode 1, its comb-like structure must be able to completely shield the comb-like structure of sensing electrode 2, and each part of the comb-like structure of shielding electrode 1 and the comb-like structure of sensing electrode 2 are arranged in a staggered manner;
[0041] The shielding electrodes 1 are supported and insulated by insulating pillars 3 ; the sensing electrodes 2 are insulated from each other by insulating pillars 3 . The insulating pillars 3 are distributed on both sides around the substrate base.
[0042] The electrode plates of the induction electrodes 2 are all made of stainless steel.
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