Organic metal compound purification equipment
A technology of organometallic compounds, which is applied in the field of organometallic compound purification equipment, can solve the problems of limiting the amount of materials to be processed, and achieve the effects of thorough collection, reduction of volatilization and waste, and increase in the amount of materials
Pending Publication Date: 2022-07-08
ANHUI BEQ EQUIP TECH
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Problems solved by technology
Generally, small decompression sublimation equipment can be placed in a glove box, but this greatly limits the amount of materials processed in a single batch
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[0015] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0016] see figure 1 , In the embodiment of the present invention, an organic metal compound purification equipment includes a sublimation chamber 1, an impurity collection cold trap 2, a material collection cold trap 3, a protection cold trap 4, a gas supply system 5 and a vacuum pump group 6; the material to be purified is placed In sublimation chamber 1; impurity collection cold trap 2, material collection cold trap 3, protection c...
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The invention discloses organic metal compound purification equipment, and relates to the technical field of organic metal compound processing, the organic metal compound purification equipment comprises a sublimation cavity, an impurity collection cold trap, a material collection cold trap, a protection cold trap, a gas supply system and a vacuum pump set; a main pipe is fixedly connected to one side of the sublimation cavity, a main communicating valve is fixedly installed in the middle of the main pipe, and one end of the main pipe is connected with an impurity collecting cold trap and a material collecting cold trap through an impurity inlet pipe and a material inlet pipe respectively; according to the device, the sublimation cavity which can be independently disassembled and assembled is arranged to contain and store a to-be-purified material, so that the quantity of single-batch treated materials is greatly increased, and a structure consisting of the impurity collection cold trap, the material collection cold trap, the protection cold trap, the air supply system and the vacuum pump group is adopted; reduced pressure distillation of materials in the sublimation cavity and separation of impurities and purified materials are achieved, and the materials are collected more thoroughly.
Description
technical field [0001] The invention relates to the technical field of organometallic compound processing, in particular to an organometallic compound purification device. Background technique [0002] Organometallic compounds are organic compounds formed by the direct connection of metal atoms to carbon atoms to form bonds. The uses of the compounds include catalysts, growth of metal films in the preparation of semiconductors, and the like. The preparation of metal films in semiconductors generally requires that the material purity reach the electronic level, that is, more than 99.9999%. If it contains more impurities, it will lead to the failure of the device. [0003] However, the purification of organometallic compounds as solid MO sources in MOCVD is a difficult problem. Quite a few metal-organic compounds, such as MgO, etc., are easily reacted with water and oxygen in the atmosphere, which cannot be purified by general distillation and rectification equipment, and ot...
Claims
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IPC IPC(8): B01D7/00B01D7/02B01D8/00
CPCB01D7/00B01D7/02B01D8/00
Inventor 孔令杰白晓航李晓丽张志琴
Owner ANHUI BEQ EQUIP TECH