Multistage MEMS optical switch unit and optical crossing device

Abstract

The invention relates to a multi-stage MEMS optical switch unit and an optical crossover device. In the multi-stage MEMS optical switch unit, a cantilever beam is used for enabling a micro-reflector to keep an initial state when N electrodes do not generate acting force; when at least one of the N electrodes generates an acting force, the micro-reflector is in a target deflection state; when the acting force is zero, the micro reflecting mirror is restored to the initial state; at least one of the N electrodes is used for generating an acting force and controlling the micro-reflector to enter a deflection state; the micro reflecting mirror is used for entering a deflection state under the acting force of at least one electrode in the N electrodes; and at least one stopper in the M stoppers is used for stopping the micro-reflecting mirror, so that the micro-reflecting mirror stops to the target deflection state.

Description

technical field [0001] The embodiments of the present application relate to the field of optical communications, and in particular, to a multi-level Micro-Electro-Mechanical System (MEMS) optical switch unit and an optical crossover device. Background technique [0002] In recent years, with the development of optical switch technology and the large-scale application of wavelength division multiplex (WDM), the capacity of optical network node equipment is getting larger and larger, which puts forward higher requirements for the survivability of the network. Cross-connect (Optical Cross-connect, OXC) integrates transmission and switching, with large transmission capacity, flexible networking, network scalability and reconfigurability, easy to upgrade, transparent transmission of various formats of different rate grades It has many advantages, such as being able to adapt to the ever-increasing demands of user signal types and service types at the same time, and is an important...

AI Technical Summary

Problems solved by technology

Seriously affects the state switching time of the micromirror, resulting in the limitation of the switching speed of OXC based on 3D analog MEMS, which is limited by the switching speed of MEMS

[0009] In addition, the MEMS structure provided by the existing technology is an analog MEMS, and there are still problems in the control mechanism and driving structure that are quite complicated. Its working mode is analog, so the control circuit needs to be able to accurately control the voltage applied to the electrodes to control the micromirror. The deflection state, the control part is complicated, and the cost is high

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