Electric trigger type soft probe calibration device and calibration method
A calibration device and electric trigger technology, applied in the field of precision measurement, can solve the problem of not considering Abbe error, etc., and achieve the effect of eliminating error, eliminating influence and accurate calibration results
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[0030] The preferred embodiments of the present invention are specifically described below with reference to the accompanying drawings, wherein the accompanying drawings constitute a part of the present application, and together with the embodiments of the present invention, are used to explain the principles of the present invention, but are not used to limit the scope of the present invention.
[0031] In the description of the present application, "plurality" means two or more, unless otherwise expressly and specifically defined.
[0032] Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present invention. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor a separate or alternative embodiment that is mutually exclusive with other embodiments. It is explici...
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