Testing of semiconductor device and fabrication process of semiconductor device

Abstract

A process of converting simulation data to test data used for testing an integrated circuit includes the steps of detecting a transition of state of the simulation data, extracting an event from the simulation data in response to the transition, and creating the test data in response to the event.

Description

technical field [0001] The present invention relates to the manufacture of semiconductor devices, more particularly, the present invention relates to the testing of semiconductor devices during the manufacturing process of semiconductor devices, and a test data processor used for generating test data during the test. Background technique [0002] As the degree of integration increases, the magnitude of integrated circuits increases. In VLSI, testing to verify the correct operation of integrated circuits becomes an important issue. [0003] Generally, the testing of integrated circuits is done using simulated data, which represent the expected functional operation of integrated circuits generated by software simulation, where simulated data is generally sampled data extracted on the time axis at predetermined sampling intervals provided in the form. The thus sampled analog data is then processed by a test data processor which converts the thus obtained sampled analog data i...

AI Technical Summary

Problems solved by technology

[0012] However, the aforementioned method of forming test data by sampling the analog data at predetermined sampling intervals or periods has the disadvantage that it is necessary to provide many different test timing information consistent with the event information of the simulated data to be processed, such as The test timing information for which TNO is "1" represented in Fig. 2D

Consequently, semiconductor devices cannot be tested with the required accuracy

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