Apparatus for measuring raster angle with linear CCD array to determine wavelength
A fixed wavelength and linear array technology, which is applied in the field of devices using linear array CCD to measure grating rotation angle and fixed wavelength, can solve the problems of belt pulley, stepping motor lost step, unable to solve the problem of screw and nut cooperation, time-consuming, etc., to speed up the measurement Speed, saving operation time of “resetting to zero” and easy to use
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[0016] Below according to accompanying drawing and principle the present invention will be described in further detail:
[0017] The principle of directly measuring the grating rotation angle with a linear array CCD device to measure the grating rotation angle and fix the wavelength is as follows: figure 1 As shown, the straight line AB in the figure is the mirror surface of the plane mirror fixed on the grating. A beam of rectangular parallel light is projected on the rotation axis O of the plane mirror, and a line array CCD (or a set of line array CCDs) is used to receive the reflected light in the direction of the reflected light (as shown by the straight line MP in the figure). The center line of the rectangular parallel light is on the CCD There is a one-to-one correspondence between the position information on the image plane and the rotation angle of the grating (that is, the blaze wavelength of the grating).
[0018] Let the angle between the traveling direction of th...
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