Producing method and arrangement for optical elements mounted with resin film with micro-concave-convex pattern and reflective board
A technology of resin film and concave-convex pattern, which is applied in the field of manufacture and device of optical element and reflector provided with resin film with micro-concave-convex pattern, can solve problems such as damage of micro-concave-convex pattern, reduce residual stress and reduce stress. Pressure, the effect of improving the pass rate
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[0075] Preferred embodiments of the present invention will be described in detail below by way of example with reference to the drawings. Dimensions, materials, shapes, relative arrangements, and the like of components described in this embodiment do not limit the scope of the present invention unless otherwise specified, and are merely illustrative examples.
[0076] 1A to 1G are explanatory views of a method of forming a concave-convex pattern for forming a micro concave-convex pattern on a resin film according to an embodiment of the present invention. First, the first method will be described with reference to FIGS. 1A-1G .
[0077] As shown in FIG. 1A , a liquid crystal drive element TFT and a wiring connection portion 31 are formed on the glass substrate 5 . A thin film of metal, insulator, or semiconductor is formed on the substrate 5 by cathode sputtering or CVD, and a resist is coated on it by a spin coating method, and baked at a high temperature to harden the resis...
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Abstract
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