Robot hand locating device

Abstract

PURPOSE: A method and apparatus for positioning the hand in place is provided to decrease an installation space by eliminating the necessity of separately attaching a sensor to an arm robot, and to reduce an interval of transfer time and shorten an interval of duct time by directly transferring a processed article to a next work place. CONSTITUTION: A pair of the first sensors(3) are disposed in the right and left direction of the hand(1). The second sensor(4) is disposed in the side part of the hand. The hand is inserted into an upper or lower portion of the processed member(2) from the front and rear directions. The first sensors calculate an angle of inclination of the processed member in the right and left direction based upon the difference of coordinates of the robot that detects the front edge(2a) or rear edge(2b) of the processed member. The hand is slanted in the right and left direction by the angle(theta) of inclination over or under the processed member. The hand is transferred in the right and left direction until the second sensor detects the side edge of the processed member while the hand is slanted in the right and left direction by the angle(theta) of inclination. The hand is transferred in the front and rear direction by the angle(theta) of inclination until the first sensor detects the front or rear edge of the processed member while the hand is slanted in the right and left direction by the angle(theta) of inclination.

Description

technical field [0001] The invention relates to a positioning device for a robot hand. Background technique [0002] In a semiconductor production line, etc., arm robots are sometimes used to transport glass substrates housed in cassettes to the next workplace. After the arm robot makes the robot arm enter the space below the glass substrate in the box body, the robot arm rises straightly and is adsorbed on the glass substrate. Then, corresponding to each glass substrate, the robotic arm is pulled out of the box and transported to the delivery position of the next workplace. [0003] There may be a phenomenon that the glass substrate is stored in a position deviated from the normal position in the box, and the arm robot corrects the position deviation while accurately transporting it to the delivery position of the next work place. [0004] The robot arm is provided with a front-back position sensor that detects the rear edge (edge ​​on the front side) of the glass substra...

AI Technical Summary

Problems solved by technology

The cost per unit area of ​​the clean room is much higher than the cost per unit area of ​​the usual workshop, and the increase in the size of the device leads to an increase in manufacturing costs

[0008] In addition, the glass substrate pulled out from the box cannot be directly transported to the next workplace. Once it needs to be moved in the direction of the left and right position sensors, the tact time of this part will be extended, and the productivity will be deteriorated.

[0009] In addition, in order to obtain the amount of deviation ΔY, the arm robot is actually moved laterally, and the amount of positional deviation ΔY is obtained by measuring the amount of movement. This may include errors in the value of the amount of positional deviation ΔY itself, making the glass substrate The positioning accuracy of the

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