Method and apparatus for leak testing
A test method and leak test technology, which is applied in the direction of measuring device, fluid tightness test, machine/structural component test, etc., can solve the problems of large extra cost and inability to detect small leaks, etc.
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[0050] Accompanying drawing 1 qualitatively shows the change course chart of vapor pressure Pv(T) with respect to temperature. At a predetermined temperature Tx, if the corresponding vapor pressure Pvx of the liquid is reached, the liquid starts to evaporate. Above the vapor pressure curve is a liquid substance, and below it is a gaseous substance.
[0051] According to FIG. 2 , the device according to the invention comprises a test cavity 1 with a lid 3 which can be sealed airtightly. The vacuum pump 5 is connected to the test cavity 1, and it can be a traction pump, a rotary piston pump, a diffusion pump, or a turbo vacuum pump, a turbo molecular pump, and the like. This depends on the degree of vacuum that the cavity 1 needs to create. In addition, there is a vacuum pressure detector 7, which is a Pirani detector, used to measure the main air pressure in the test cavity 1. There is at least one closed container 9, at least a certain degree of filling is housed therein, a...
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