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Apparatus for producing water containing dissolved ozone

A technology of ozone and equipment, applied in the field of water equipment

Inactive Publication Date: 2002-05-29
KURITA WATER INDUSTRIES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But an excess of ozone is required in this device, because the drop in the amount of ozone in water containing dissolved ozone due to spontaneous decomposition needs to be replaced by ozone dissolved from the gas phase into the water phase

Method used

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  • Apparatus for producing water containing dissolved ozone
  • Apparatus for producing water containing dissolved ozone
  • Apparatus for producing water containing dissolved ozone

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] The same procedure as in Comparative Example 1 was followed, except that 5 liters of an anion exchange resin loaded with 1 wt% of palladium was placed on the uppermost of the mixed bed type ion exchange resin column. The thickness of the palladium-supporting resin layer was 5% of the thickness of the ion exchange resin layer.

[0052] The concentration of TOC in the obtained ultrapure water was 0.5 μg / l, which was the same as in Comparative Example 1. In the water containing dissolved ozone extracted at a position 50 m from the injector, the concentration of ozone was 9 mg / l.

Embodiment 2

[0054] Follow the same procedure as in Comparative Example 1, but the column is packed with 1 liter of anion exchange resin loaded with 1 wt% of palladium, which is the same as that used in Example 1, and the downstream of the pipeline branch point is set Ultrafiltration unit, 1 m obtained from the subsystem used in Comparative Example 1 3 / h of ultrapure water passes through a column packed with palladium-loaded resin and an ultrafiltration device.

[0055] In water containing dissolved ozone extracted as a sample at a position 50 m away from the injector, the concentration of ozone was 10 mg / l.

[0056] By comparing the results of Example 1 and Example 1 and Example 2, it can be seen that the upstream of the device for dissolving ozone is provided with a column of an anion exchange resin loaded with palladium, and the ultrapure water is mixed with the loaded The anion exchange resin of palladium is in contact with each other, and the ultrapure water passing through the cata...

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Abstract

An apparatus for producing water containing dissolved ozone which comprises (A) a piping for supplying ultrapure water through which ultrapure water is supplied, (B) a catalytic reaction portion which is connected with the piping for supplying ultrapure water and in which the ultrapure water is brought into contact with an oxidation-reduction catalyst, (C) a filtration apparatus by which the ultrapure water treated in the catalytic reaction portion is filtered and (D) an apparatus for dissolving ozone in which ozone is dissolved into the ultrapure water discharged from the filtration apparatus; and an apparatus for producing water containing dissolved ozone which comprises an apparatus for producing ultrapure water which is equipped with an apparatus for irradiating with ultraviolet light, an apparatus for dissolving ozone in which ozone is dissolved into the ultrapure water produced in the apparatus for producing ultrapure water and a catalytic reaction portion which is packed with an oxidation-reduction catalyst and disposed between the apparatus for irradiating with ultraviolet light and the apparatus for dissolving ozone. Substances promoting decomposition of ozone which are contained in ultrapure water in very small amounts are removed and water containing dissolved ozone which shows little decrease in the concentration of ozone and has a great residual fraction of ozone dissolved in water after transportation for a long distance can be obtained.

Description

technical field [0001] The present invention relates to an apparatus for producing water containing dissolved ozone. In particular, the present invention relates to an apparatus for removing substances that promote ozone decomposition present in very small amounts in ultrapure water, and capable of providing water containing dissolved ozone that, after being transported over long distances , the concentration of its ozone rarely drops, and there is still a large remaining proportion of ozone dissolved in the water. Background technique [0002] In order to achieve high quality and high yield of electronic material products such as silicon substrates for semiconductors, glass substrates for liquid crystals, and quartz substrates for photomasks, it is important to remove foreign substances from the surface of electronic materials. Therefore, wet cleaning is widely used. Using a scrubbing solution with strong oxidizing power is effective for removing organic and metallic impu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01F3/04C01B13/10C02F1/32C02F1/44C02F1/68C02F1/72C02F1/78
CPCC02F1/725C02F1/68C02F1/78C01B13/10B01F2003/04886Y10S210/90C02F2201/782B01F3/04985C02F1/32B01F3/04099C02F2103/04C02F2103/12C02F1/44B01F23/23B01F23/237613B01F23/29B01F21/00
Inventor 森田博志太田治水庭哲夫塚本和巳
Owner KURITA WATER INDUSTRIES LTD
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