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Wire frame, semiconductor device using such frame and its mfg. method

A manufacturing method and lead frame technology, which are used in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problems of impossible miniaturization, complex manufacturing process, and high cost

Inactive Publication Date: 2002-09-18
III HLDG 12 LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] However, since BGA-type or LGA-type semiconductor devices use a laminated multilayer printed circuit board (carrier) made of ceramic materials and resin materials, there is a problem that the manufacturing process is complicated and the cost is extremely high.
[0013] Also, there is the following problem: even if the Figure 12 and Figure 13 The manufacturing method of the conventional resin-sealed type semiconductor device shown is continued to be used as a manufacturing method of BGA type or LGA type semiconductor device, but since it is necessary to provide a connection support portion for connecting a plurality of bosses as external terminals to the frame before processing , and if more than 3 rows of bosses are set, miniaturization becomes impossible
[0014] In addition, in the conventional method of manufacturing a resin-sealed semiconductor device, the accuracy of mounting on a printed circuit board is lower than that of a surface-mounted semiconductor device such as a BGA type or an LGA type.

Method used

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  • Wire frame, semiconductor device using such frame and its mfg. method
  • Wire frame, semiconductor device using such frame and its mfg. method
  • Wire frame, semiconductor device using such frame and its mfg. method

Examples

Experimental program
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Effect test

Embodiment 1

[0130] Hereinafter, Embodiment 1 of the present invention will be described with reference to the drawings.

[0131] figure 1 This shows the lead frame in the first embodiment of the present invention, that is, the bottom surface structure of the part including one die pad of the lead frame, and the lead frame is provided with a plurality of die pads with inner inner lead parts before insulation processing.

[0132] Such as figure 1 As shown, the lead frame 10 has the following parts: a frame part 11; inside the frame part 11, the four corners are supported by the support lead part 12 as a connection support part, and the upper surface ( figure 1 The backside of the semiconductor element is held by the die pad portion 13; each is supported by the peripheral portion of the die pad portion 13, a plurality of inner inner lead portions 14A with convex portions 14a on the bottom surface; arranged between the frame portion 11 and the inner inner lead portion 14A Meanwhile, while ext...

Embodiment 2

[0155] Hereinafter, Embodiment 2 of the present invention will be described with reference to the drawings.

[0156] Figure 5 (a) and Figure 5 (b) is a resin-sealed semiconductor device according to Embodiment 2 of the present invention, (a) is a plan view, and (b) shows an enlarged cross-sectional structure of (a) on the line Vb-Vb. in Figure 5 (a) and Figure 5 (b), right and figure 2 with image 3 The structural members that are the same as the structural members shown use the same symbols, and their descriptions are omitted.

[0157] Figure 5 (a) and Figure 5 (b) The resin-sealed semiconductor device 40 of Example 2 shown in figure 2 The lead frame 10 of the illustrated embodiment 1 has a lead frame of the same structure, and both the inner inner lead portion 14A and the outer inner lead portion 14B are changed into two columns, forming a four-row structure.

[0158] Such as Figure 5 As shown in (b), the resin-sealed semiconductor device 40 is composed of the lower p...

Embodiment 3

[0173] Hereinafter, Embodiment 3 of the present invention will be described with reference to the drawings.

[0174] Figure 6 (a) and Figure 6 (b) is the lead frame of embodiment 3 of the present invention, (a) shows the bottom surface structure of a part of a die pad including the lead frame, and the lead frame is provided with a plurality of insulating (isolated) bosses before processing Die pad part; (b) shows the cross-sectional structure on the VIb-VIb line of (a).

[0175] Such as Figure 6 (a) and Figure 6 As shown in (b), the lead frame 30 includes a frame portion 31; it is arranged inside the frame portion 31, and a die pad portion 33 holding a semiconductor element is held thereon; and the die pad portion 33 is respectively arranged at the peripheral portion There are three rows, and the surface (bottom surface) opposite to the element holding surface has a plurality of inner lead portions 34 as convex portions of bosses.

[0176] Among the plurality of inner lead po...

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PUM

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Abstract

A lead frame 10, comprising: a frame portion 11; disposed between the frame portion 11 and an inner inner lead portion 14A, and extending from the frame portion 11 to the inner side, and having a convex portion 14a under the die pad portion 13 a plurality of outer inner lead portions 14B. The inner inner lead portion 14A is insulated from the die pad portion 13 by cutting away the support portion of the die pad portion 13 and the inner inner lead portion 14A. Bottom surfaces of the frame portion 11 , the plurality of inner inner lead portions 14A, and the outer inner lead portions 14B are held by an adhesive tape material 20 as a lead holding material. From a single-layer metal plate, it is relatively easy to obtain a small lead frame with a multi-row boss structure, especially with more than 3 rows of bosses.

Description

Technical field [0001] The present invention relates to a lead frame for a land grid array (LGA) having exposed external terminals arranged in an array on the bottom surface of a package, that is, a plurality of bosses, and a resin-sealed type using the lead frame Semiconductor devices and their manufacturing methods. Background technique [0002] In recent years, in order to adapt to the miniaturization and high functionality of electronic equipment, there has been an increasing demand for high-density mounting of semiconductor components. Along with this trend, the miniaturization and thinning of resin-sealed semiconductor devices that use molded resin materials to seal semiconductor chips and wires as a unit are rapidly developing. While miniaturization and thinning are pursued, multiple pins are more desirable. [0003] Hereinafter, a lead frame used in a conventional resin-sealed semiconductor device will be described with reference to the drawings. [0004] Picture 12 Rep...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/48H01L21/56H01L23/31H01L23/495H01L23/50
CPCH01L21/4821H01L21/4828H01L21/566H01L21/568H01L23/3107H01L23/49503H01L23/49548H01L24/28H01L24/32H01L24/45H01L24/48H01L24/73H01L2221/68318H01L2224/29007H01L2224/29111H01L2224/29139H01L2224/29339H01L2224/32014H01L2224/32245H01L2224/45015H01L2224/45144H01L2224/48091H01L2224/48247H01L2224/49433H01L2224/73265H01L2924/01005H01L2924/01006H01L2924/01011H01L2924/01013H01L2924/01015H01L2924/01023H01L2924/01028H01L2924/01029H01L2924/01033H01L2924/01039H01L2924/01046H01L2924/01047H01L2924/0105H01L2924/01078H01L2924/01079H01L2924/01082H01L2924/0132H01L2924/0133H01L2924/12044H01L2924/15747H01L2924/181H01L2924/00014H01L2924/00012H01L2924/01026H01L2924/01083H01L2924/00H01L21/56H01L23/50
Inventor 南尾匡纪川合文彦大广雅彦古市正德佐藤圭则小贺彰福田敏行
Owner III HLDG 12 LLC
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