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Semiconductor mfg. system and control method thereof

A technology for manufacturing systems and semiconductors, applied in the field of control of computer-readable recording media and semiconductor integrated circuit manufacturing systems, which can solve problems such as expensive backup devices and deterioration of cost indicators

Inactive Publication Date: 2003-07-02
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in such a case, there is a problem that its cost indicators are deteriorated, since such a backup device is expensive

Method used

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  • Semiconductor mfg. system and control method thereof
  • Semiconductor mfg. system and control method thereof
  • Semiconductor mfg. system and control method thereof

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Embodiment Construction

[0037] Hereinafter, a description is given of an embodiment of the present invention with reference to the drawings. In the drawings, the same parts are given the same reference numerals. Although the semiconductor integrated circuit manufacturing system for manufacturing semiconductor integrated circuits on a wafer is described in detail below, the present invention is also applicable to systems for manufacturing liquid crystal display panels and the like.

[0038] figure 1 The structure of a semiconductor integrated circuit manufacturing system according to an embodiment of the present invention is shown. Such as figure 1 As shown, the semiconductor integrated circuit manufacturing system according to this embodiment includes a processing control section 10, first to sixth processing sections 11-16, a processing section 17, a conveying path 18, a conveying rail 19, a driver 21, and a stocker 23. The processing control section 10 includes an input section 1, a first control se...

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PUM

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Abstract

In a semiconductor manufacturing system, operations of a plurality of processing apparatuses are controlled to efficiently manufacture semiconductor devices. The semiconductor manufacturing system has a memory part and a control part. The memory part (5) stores priority-level data indicating a priority level of the process to be applied to each of the semiconductor substrates on an individual semiconductor substrate basis. The control part (3, 7) controls the processing apparatus to apply the process to a newly supplied semiconductor substrates by determining process order, based on a comparison of the new priority-level data of the newly supplied one with priority-level data with respect to the originally scheduled process of the semiconductor substrates.

Description

Technical field [0001] The present invention relates to a semiconductor integrated circuit manufacturing system, in particular to a control method of the semiconductor integrated circuit manufacturing system, and a computer-readable recording medium storing a program for realizing the above-mentioned control method of the semiconductor integrated circuit manufacturing system. Background technique [0002] In conventional semiconductor integrated circuits, the time spent in each manufacturing process is manually calculated. For example, the time when the wafer is sent to the processing chamber and the time when the processing of the wafer ends are repeatedly recorded, so based on the time when the wafer is sent and the processing ends, the processing time can be roughly calculated. [0003] In addition, since in the traditional manufacturing equipment of semiconductor integrated circuits, special treatment is not taken into consideration when the equipment fails during the process...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02G05B19/418
CPCG05B2219/32266G05B2219/32254G05B2219/32349G05B2219/32256G05B2219/45031G05B2219/32297G05B19/41865Y02P90/02H01L21/00
Inventor 唐沢涉
Owner TOKYO ELECTRON LTD