Film piezoelectric element and manufacturing method thereof and executive component using the piezoelectric element

Abstract

A thin-film piezoelectric element, a manufacturing method thereof, and an actuator using the thin-film piezoelectric element. In the actuator of the present invention, the first and second structures in which the piezoelectric film is sandwiched between the main electrode film and the counter electrode film are respectively formed on two substrates. The first main electrode film 2 and the first counter electrode film 5 have protrusions 211 and 511 , respectively, and the second counter electrode film 15 has a protrusion 151 . There are connection wirings 9 for connecting the structure bonding the above two structures and the protruding portion 211 and the second main electrode film 12 , and between the protruding portion 511 and the protruding portion 151 . In this way, an actuator capable of high-precision position control can be provided.

Description

technical field [0001] The present invention relates to a thin-film piezoelectric element, a manufacturing method thereof, and an actuator using the thin-film piezoelectric element. Background technique [0002] In recent years, with the advancement of semiconductor technology, efforts are being made to realize microcomputers that can be greatly reduced in size using semiconductor manufacturing technology, and mechanical and electrical components such as micro actuators have appeared. Such a source can realize high-precision mechanical mechanism parts, and by using semiconductor technology, its productivity can be greatly improved. In particular, microactuators using piezoelectric elements are used for microdisplacement of scanning tunneling microscopes or micropositioning of magnetic head sliders in magnetic disk recording and reproducing devices. [0003] For example, in a magnetic disk reproducing and recording device, a magnetic head for recording and reproducing inform...

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Problems solved by technology

[0007] However, in the above example, the external electrodes are formed from both sides of the laminated body of the multilayer piezoelectric component through the insulating layer, so at least the formation of the external electrodes needs to be carried out one by one. There is a problem with

However, since the displacement in the direction perpendicular to the substrate surface is generated, it is not suitable for the structure of the tiny actuator of the magnetic head slider of the magnetic disk recording and reproducing device.

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