Device for cleaning electrode in high strength gas discharge light source with no air vent and its cleaning method
A technology for cleaning devices and exhaust ports, which is applied in the field of electric light sources, and can solve problems such as deterioration of lamp ignition characteristics, high working temperature of electrode surfaces, and rise in impurity concentration, and achieve the effects of simple structure, convenient operation, and good cleaning effect
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[0013] Example: The volume of the pre-discharge chamber 1 is about 8cm 3 , The electrode lead 2 is a molybdenum rod of φ1mm, the inner diameter of the electrode holder 3 is φ0.5mm, the electrode 4 to be cleaned is a pure tungsten rod of φ0.4mm, 8mm long, and its head is wound with a selected heat-conducting tungsten ring. Under vacuum conditions, bake the discharge chamber with a coal-oxygen flame, so that the electrodes are in the reddish initial gas release stage, and maintain it for 5 to 10 minutes, then turn off the vacuum conditions. Then fill it with 3000PaAr, maintain the discharge for 2 minutes at a discharge current of 5A, and then vacuumize. Then fill it with 1500PaAr, maintain the discharge for 5 minutes under the condition of 9A, and then evacuate. Fill it with 600PaAr again, maintain the discharge for 8 minutes under the condition of 12A, and finally exhaust it. Cut off after cooling, and take out the electrode under a protective atmosphere. The 100w UHP projec...
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