Light mask and diffuse-reflecting board
A technology of diffuse reflection plate and photomask, applied in the direction of diffusion elements, optics, optical elements, etc., can solve the problems of high reflection luminance, difficult quality management, poor repeatability, etc., and achieve the effect of improving reflection luminance
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Embodiment 1
[0104] In the rectangular unit area (66 μm×198 μm) constituting the pattern area of the photomask, center points (73) of circular translucent portions with an outer diameter of 9 μm were arranged in a predetermined arrangement. The configuration is determined by the above method using random numbers. In the resulting configuration, the mean value A prescribed by the Dorronai triangle group (X) is 90 μm 2 , the value of B / A is 0.2. A filter plate with a diffuse reflection plate was fabricated using a photolithography technique realized by proximity exposure using this photomask. In addition, the unit area and the light-transmitting part on the photomask correspond to the unit pixel and the concave-convex part of the color filter.
[0105] First, on a cleaned glass substrate (Corning 1737) of 370×470×0.7 mm, a carbon black-added light-absorbing resist film (transmittance: 0.2 / μm) with a film thickness of 1.1 μm was applied. The resulting resist film was pre-baked on a hot p...
Embodiment 2)~( Embodiment 5
[0114] Within the scope of satisfying the above conditions (1) and (2), change the area of the rectangular unit area, the number of light-transmitting parts, the average value A and B / A, and make a photomask with the pattern area according to the present invention, A diffuse reflection plate was produced in the same process as in Example 1 using this photomask.
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