Method of cleaning reverse osmosis membrane and discharge water recovery method using said method

A technology of reverse osmosis membrane and waste water recovery, which is applied in the direction of osmosis/dialysis water/sewage treatment, separation methods, chemical instruments and methods, etc., and can solve the problems of low cost and other problems

Inactive Publication Date: 2005-05-25
WINBOND ELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But at the same time, it has to bear the extra cost of increasing equipment and operation, or the large-scale use of consumables such as activated carbon, ion

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  • Method of cleaning reverse osmosis membrane and discharge water recovery method using said method
  • Method of cleaning reverse osmosis membrane and discharge water recovery method using said method

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Embodiment Construction

[0035] see figure 2 , is a method for cleaning a reverse osmosis membrane according to an embodiment of the present invention. In this method, before cleaning the reverse osmosis membrane 120, a cleaning agent preparation will be carried out. The steps are as follows. First, start a high-pressure pump 200, and open the valve 1, so that the filtrate 250 flows through the pressure gauge P1 and enters the reverse osmosis membrane. Permeable membrane 120-1.

[0036] If the water quality of the filtrate discharged from the reverse osmosis membrane 120-1 at this time meets the standard of process water, it will directly pass through the valve 11 through the flow meter F4 and enter the water production tower 130 for storage for use in the process, or by the branch pipeline ( Through the valve 8, through the flow meter F3 and the valve 10), it enters the temporary storage tower 140 for storage. During this period, the valve 9 can also be opened to introduce the wastewater into a neu...

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Abstract

A process for washing the counter-osmosizing membrane includes such steps as introducing a chemical solution to said membrane, laying aside, sequentially from low-pressure to high-pressure flushing, and holding in high-pressure state while generating a microvibration. A process for recovering its sewage is also disclosed.

Description

technical field [0001] The invention relates to a waste water treatment procedure in a semiconductor manufacturing process, in particular to a method for quickly cleaning a reverse osmosis membrane in a waste water recovery system. Background technique [0002] The waste water from the semiconductor process is divided into the waste water generated in the IC manufacturing and packaging process. In the IC manufacturing, due to the variety of products and the different process combinations, the changes in the types of chemical substances contained in the discharged waste water are also quite complicated. Most of them are Part of it is discharged by cleaning chips with pure water, removing photoresist, etching, and cleaning of greenhouse gas combustion damage. Generally, it can be slightly divided into acid-base wastewater and fluorine-containing wastewater. The main components are organic matter, metal ions, suspended Solids, strong oxides and fluoride ions. [0003] In addit...

Claims

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Application Information

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IPC IPC(8): B01D29/66C02F1/44
Inventor 刘凯溢陈奎麟徐国明
Owner WINBOND ELECTRONICS CORP
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