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Filming device and method of glass substrate

A technology for glass substrates and coating devices, which is applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc., and can solve the problems of film cutting length deviation, vibration, and inflow of foreign objects.

Inactive Publication Date: 2005-06-08
SAMSUNG CORNING CO LTD
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

[0004] Therefore, in the past, it was necessary to convey the heavy roller head 4 up and down, so there was vibration when coating the glass substrate, and there was a problem that the servo motor driving the roller head 4 was overloaded.
In addition, when foreign substances flow in during film coating, there may be a problem that the cut length of the film may vary.

Method used

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  • Filming device and method of glass substrate
  • Filming device and method of glass substrate
  • Filming device and method of glass substrate

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Embodiment Construction

[0011] Hereinafter, a glass substrate coating device according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

[0012] figure 2 and FIG. 3 is a front view and a top view of a glass substrate film coating device according to a preferred embodiment of the present invention. As shown in the figure, the glass substrate coating device of the present invention includes: a loading conveyor 100, which floats the glass substrate with air in a vertical state on both sides without contact, and conveys it in one direction; the first and second film applicators 200, 250, they are configured on a straight line with the loading conveyor 100 and are vertically arranged so as to simultaneously coat the film on both sides of the glass substrate in a vertical state discharged from the loading conveyor 100; 1 and the second film applicator 200, 250 are conveyed between the film roll supply position and the coating position respecti...

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Abstract

The invention provides a film coating device and method for a glass substrate. It applies thin films to large glass substrates while effectively utilizing the clean room, minimizing downtime, vibration of the glass substrate, adhesion of foreign matter, etc. Contains: a loading conveyor that floats the glass substrate in a vertical state on both sides without contact; first and second film applicators that are installed vertically to apply a film to both sides of the glass substrate discharged from the above loading conveyor ; The applicator conveying equipment is used to move the first and second film applicators respectively between the coating position and the supply position; the unloading conveyor transports the glass substrate coated with the film on both sides to one direction; and The control mechanism controls the operation of the loading / unloading conveyor, the first and second film applicators, and the applicator conveying equipment.

Description

technical field [0001] The present invention relates to a film coating device for a glass substrate and a method thereof, in particular to a film coating device and a method for such a glass substrate. After a large glass substrate is placed vertically and enters the film coating device, a thin film is applied to both sides of the glass substrate. This reduces vibration and prevents the inflow of foreign matter, and by minimizing the installation space of coating equipment, it is possible to efficiently use the space of the clean room. Background technique [0002] Generally, glass substrates used in the field of manufacturing flat panel displays such as TFT-LCD (thin film transistor liquid crystal display), PDP (plasma display), EL (Electro luminescence, organic electroluminescence) are glass melted in a glass melting furnace. After the liquid is supplied to the melting molding machine to manufacture, it is cut according to the preliminary specification, and the surface is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/683C03C23/00H01L21/68
Inventor 李昌夏任祥在金圣撤奇永宰柳炅沅
Owner SAMSUNG CORNING CO LTD
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