A method and apparatus for processing nanoscopic structures
A technology for nano and positioning structures, which is applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., and can solve problems such as huge complexity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0095] The present invention provides a growth processing unit and process control device for growing and etching nanostructures on large substrates or workpieces in an efficient manner. The nanostructures can be used in a wide range of applications, such as detection, computation and fabrication of chemicals or new nanostructures. The central concept of this processing cell is to obtain low-cost and flexible operation in a specialized research environment established within a research institute of a university or company.
[0096] The present invention generally relates to the growth and / or etching of any form of nanometer and up to micron-scale sized surfaces in enclosed or bonded processing cells (which are larger than these dimensions) in combination with the means required in the processing cells . The concept of the processing unit provides a convenient way to insert a special research protocol into the process control instrument, process the nanostructure and remove th...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 