Method for eliminating error of Shack Hartmann wavefront sensor model
A wavefront sensor, model error technology, applied in instruments, scientific instruments, measuring devices, etc., can solve problems such as model errors
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[0017] The steps of the specific embodiment of the present invention are as follows:
[0018] (1) According to the type and layout of the beam splitting element used by the Shack-Hartmann wavefront sensor, the calculation process is as follows:
[0019] (a) Definition of model error: In principle, Φ(x, y) is measured by the Shack-Hartmann wavefront sensor as Φ′(x, y), and the difference between the two is δ(x, y), namely is the model error; its essence includes two parts: discrete sampling error and reconstruction error.
[0020] (b), arbitrary wavefront Φ(x, y) can be expanded using orthogonal Zernike polynomials as basis functions:
[0021] Φ = ( x , y ) = Σ k = 1 l a k · z k ( ...
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